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ANCHOR-TILT CANCELLING ACCELEROMETER

  • US 20120125104A1
  • Filed: 09/30/2011
  • Published: 05/24/2012
  • Est. Priority Date: 11/24/2010
  • Status: Active Grant
First Claim
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1. An accelerometer, comprising:

  • a mechanical structure, comprising;

    a substrate;

    an anchor coupled to the substrate;

    a support arm rigidly coupled to the anchor; and

    a first proof mass flexibly coupled to the support arm that moves in response to acceleration;

    a first transducer configured to measure a first distance between a first reference area and a first portion of the mechanical structure;

    a second transducer configured to measure a second distance between a second reference area and a second portion of the mechanical structure;

    a signal processing circuit coupled to the first transducer and the second transducer configured to produce an output responsive to acceleration and not responsive to anchor motion based on the first distance and the second distance.

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