ANCHOR-TILT CANCELLING ACCELEROMETER
First Claim
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1. An accelerometer, comprising:
- a mechanical structure, comprising;
a substrate;
an anchor coupled to the substrate;
a support arm rigidly coupled to the anchor; and
a first proof mass flexibly coupled to the support arm that moves in response to acceleration;
a first transducer configured to measure a first distance between a first reference area and a first portion of the mechanical structure;
a second transducer configured to measure a second distance between a second reference area and a second portion of the mechanical structure;
a signal processing circuit coupled to the first transducer and the second transducer configured to produce an output responsive to acceleration and not responsive to anchor motion based on the first distance and the second distance.
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Abstract
Described herein is an accelerometer that can be sensitive to acceleration, but not anchor motion due to sources other than acceleration. The accelerometer can employ a set of electrodes and/or transducers that can register motion of the proof mass and support structure and employ and output-cancelling mechanism so that the accelerometer can distinguish between acceleration and anchor motion due to sources other than acceleration. For example, the effects of anchor motion can be cancelled from an output signal of the accelerometer so that the accelerometer exhibits sensitivity to only acceleration.
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Citations
20 Claims
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1. An accelerometer, comprising:
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a mechanical structure, comprising; a substrate; an anchor coupled to the substrate; a support arm rigidly coupled to the anchor; and a first proof mass flexibly coupled to the support arm that moves in response to acceleration; a first transducer configured to measure a first distance between a first reference area and a first portion of the mechanical structure; a second transducer configured to measure a second distance between a second reference area and a second portion of the mechanical structure; a signal processing circuit coupled to the first transducer and the second transducer configured to produce an output responsive to acceleration and not responsive to anchor motion based on the first distance and the second distance. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An accelerometer, comprising:
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a mechanical structure, comprising; a substrate; an anchor coupled to the substrate; a support arm coupled to the anchor; and a first proof mass flexibly coupled to the support arm that moves in response to acceleration; a first electrode configured to measure a first distance between a first reference area and a first portion of the mechanical structure; a second electrode configured to measure a second distance between a second reference area and a second portion of the mechanical structure; a signal processing circuit coupled to the first electrode and the second electrode configured to produce an output responsive to acceleration and not responsive to anchor motion based on the first distance and the second distance. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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20. An accelerometer, comprising:
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means for measuring a first distance between a first reference area and a first portion of a mechanical structure, wherein the mechanical structure comprises a substrate, an anchor coupled to the substrate, a support arm rigidly coupled to the anchor, and a first proof mass flexibly coupled to the support arm that moves in response to acceleration; means for measuring a second distance between a second reference area and a second portion of the mechanical structure; and means for generating an output responsive to acceleration and not responsive to anchor motion based on the first distance and the second distance.
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Specification