DUAL WAFER STAGE EXCHANGING SYSTEM FOR LITHOGRAPHIC DEVICE

• US 20120127448A1
• Filed: 05/25/2010
• Published: 05/24/2012
• Est. Priority Date: 04/03/2009
• Status: Active Grant

• Current Assignee: Tsinghua University
• Original Assignee: Tsinghua University
• Inventors: Zhu, Yu, Zhang, Ming, Wang, Jingsong, Tian, Li, Xu, Dengfeng, Yin, Wensheng, Duan, Guanghong, Hu, Jinchun
• Granted Patent: US 9,030,648 B2
• Time in Patent Office: Days
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70733 Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask

Abstract

A dual wafer stage exchanging system for a lithographic device is disclosed, said system comprises two wafer stages running between an exposure workstation and a pre-processing workstation, and said two stages are set on a base and suspended above the upper surface of the base by air bearings. Each wafer stages is passed through by a Y-direction guide rail respectively, wherein one end of said guide rail is connected with a main driving unit and another end of said guide rail is detachably coupled with one of the two X-direction auxiliary driving units with single degree of freedom, and said two wafer stages are capable of moving in Y-direction along the guide rails and moving in X-direction under the drive of the auxiliary driving units with single degree of freedom. The position exchange of said two wafer stages can be enabled by the detachment and connection of the Y-direction guide rails and the auxiliary units with single degree of freedom.

Claims

1. A dual wafer stage exchanging system for a lithographic device, the system comprising a first wafer stage (13) operating at an exposure workstation (3) and a second wafer stage (14) operating at a pre-processing workstation (4), the two wafer stages being disposed on a same rectangular base (1) with long side in X direction and short side in Y direction, the two wafer stages being over a top surface (2) of the base, characterized in that:

disposed at the two long sides of the base are a first Y linear motor stator (5) and a second Y linear motor stator (6) respectively, the first main driving unit (11), the first 1-DOF auxiliary driving unit (7) and the second 1-DOF auxiliary driving unit (8) share the first Y linear motor stator (5), the second main driving unit (12), the third 1-DOF auxiliary driving unit (9) and the fourth 1-DOF auxiliary driving unit (10) share the second Y linear motor stator (6);

the first Y-direction guide rail (15) passes through the first wafer stage (13), and the second Y-direction guide rail (16) passes through the second wafer stage (14);

the first Y-direction guide rail (15) has one end connected with the first main driving unit (11) and the other end butted with the fourth 1-DOF auxiliary driving unit (10);

the fourth 1-DOF auxiliary driving unit (10) and the first Y-direction guide rail (15) are in separate structure by which they are disconnected upon position exchange of the two wafer stages;

the second Y-direction guide rail (16) has one end connected with the second main driving unit (12) and the other end butted with the second 1-DOF auxiliary driving unit (8);

the second 1-DOF auxiliary driving unit (8) and the first Y-direction guide rail (16) are in separate structure by which they are disconnected upon position exchange of the two wafer stages;

when the two wafer stages exchange their positions, first of all, the first wafer stage (13) moves toward the first main driving unit (11) along the first Y-direction guide rail (15), and the second wafer stage (14) moves toward the second main driving unit (12) along the second Y-direction guide rail (16);

then, the first Y-direction guide rail (15) separates from the fourth 1-DOF auxiliary driving unit (10) and moves toward the first main driving unit (11), and the second Y-direction guide rail (16) separates from the second 1-DOF auxiliary driving unit (8) and moves toward the second main driving unit (12), at the same time the second 1-DOF auxiliary driving unit (8) and the fourth 1-DOF auxiliary driving unit (10) move to left and right edges of the base, respectively;

then, the first main driving unit (11) and the second main driving unit (12) drive the first wafer stage (13) and the second wafer stage (14) respectively to experience station exchange in X direction, at the same time, the first 1-DOF auxiliary driving unit (7) moves to an initial position of the exposure workstation (3), and the third 1-DOF auxiliary driving unit (9) moves to an initial position of the pre-processing workstation (4);

Finally, the first Y-direction guide rail (15) and the third 1-DOF auxiliary driving unit (9) are butted together, and the first wafer stage (13) moves to an initial position of the pre-processing workstation (4), the second Y-direction guide rail (16) and the first 1-DOF auxiliary driving unit (7) are butted, and the second wafer stage (14) moves to an initial position of the exposure workstation (3), the exchange is completed and the system enters a next cycle.

2. The dual wafer stage exchanging system for a lithographic device according to claim 1, characterized in that:

said first 1-DOF auxiliary driving unit (7), the second 1-DOF auxiliary driving unit (8), the third 1-DOF auxiliary driving unit (9) and the fourth 1-DOF auxiliary driving unit (10) are all provided with linear motor rotors (17) on their bottom, each 1-DOF auxiliary driving unit is provided with a vacuum preloaded air bearing (19) on its side surface that contacts the base, each 1-DOF auxiliary driving unit is provided with a permanent magnetism preloaded air bearing (20) on its bottom surface that contacts the base;

said first main driving unit (11) and said second main driving unit (12) are 2-DOF driving units, on the bottom of each of which are mounted a linear motor rotor (17) same as that of the 1-DOF auxiliary driving unit, each main driving unit is provided with a vacuum preloaded air bearing (19) on its side surface that contacts the base, each main driving unit is provided with a permanent magnetism preloaded air bearing (20) on its bottom surface that contacts the base, and further, between a top of each main driving unit and the Y-direction guide rail, a roller ball guide rail or an air bearing is mounted for guiding and a linear motor or a friction wheel plus a stepper motor is mounted for driving, so as to enable the main driving unit to drive and support the Y-direction guide rail.

3. The dual wafer stage exchanging system for a lithographic device according to claim 2, characterized in that:

a linear grating for position feedback is mounted on the linear motor of each said driving unit respectively.

4. The dual wafer stage exchanging system for a lithographic device according to claim 1, characterized in that:

said dual wafer stage exchanging system for the lithographic device further comprises a dual frequency laser interferometer for position feedback of wafer stage movement.