Method and System for Pump Priming
First Claim
Patent Images
1. A pump for semiconductor manufacturing comprising:
- one or more motors to draw fluid into an inlet of the pump and dispense fluid from an outlet of the pump;
a removable filter disposed in a fluid flow path between the pump inlet and the pump outlet;
a pump controller configured to select a priming routine from a set of priming routines based on a filter type and process fluid, wherein the set of priming routines comprises;
a first priming routine that includes a forward pressurization segment for a first type of removable filter; and
a second priming routine for that includes a back pressurization segment for a second type of removable filter;
control the pump to perform the selected priming routine to prime the removable filter.
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Abstract
The disclosure describes systems and methods relating generally to filtration. Even more particularly, embodiments described herein relate to optimizing operating routines of a pump based on filter. Embodiments of priming routines described herein can perform a back pressure step to pressurize the filter from downstream and a back flush step to flush the filter from downstream.
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Citations
20 Claims
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1. A pump for semiconductor manufacturing comprising:
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one or more motors to draw fluid into an inlet of the pump and dispense fluid from an outlet of the pump; a removable filter disposed in a fluid flow path between the pump inlet and the pump outlet; a pump controller configured to select a priming routine from a set of priming routines based on a filter type and process fluid, wherein the set of priming routines comprises; a first priming routine that includes a forward pressurization segment for a first type of removable filter; and a second priming routine for that includes a back pressurization segment for a second type of removable filter; control the pump to perform the selected priming routine to prime the removable filter. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for priming a filter in a semiconductor manufacturing pump comprising:
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connecting a removable filter to the pump; selecting a priming routine for the removable filter based on a filter type and process fluid; operating the pump according to the selected priming routine, wherein the operating the pump according to the selected priming routine comprises introducing a process fluid to the removable filter and back-pressurizing the removable filter for a predetermined period of time. - View Dependent Claims (12, 13, 14, 15)
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16. A computer program product comprising a non-transitory storage medium storing a set of computer executable instructions comprising instructions executable to:
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receive filter information and process fluid information; select a priming routine for the removable filter based on the filter information and process fluid information; operate a pump according to the selected priming routine, wherein operating the pump according to the selected priming routine comprises introducing a process fluid to the removable filter and back-pressurizing the removable filter for a predetermined period of time. - View Dependent Claims (17, 18, 19, 20)
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Specification