GEL POLYMER PEN LITHOGRAPHY

• US 20120128882A1
• Filed: 02/18/2010
• Published: 05/24/2012
• Est. Priority Date: 02/18/2009
• Status: Abandoned Application

• Current Assignee: Northwestern University
• Original Assignee: Northwestern University
• Inventors: Mirkin, Chad A., Huo, Fengwei, Chen, Xiaodong
• Application Number:
  US13/201,947
• Publication Number:
  US 20120128882A1
• Time in Patent Office: Days
• US Class Current: 427/256
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping

Abstract

The disclosure relates to methods of printing indicia on a substrate using a tip array comprised of elastomeric, compressible gel polymers. The tip array can be prepared using conventional photolithographic methods and can be tailored to have any desired number and/or arrangement of tips. Numerous copies (e.g., greater than 15,000, or greater than 11 million) of a pattern can be made in a parallel fashion in as little as 40 minutes.

Claims

1. A tip array comprising a plurality of tips fixed to a common substrate layer, the tips and common substrate layer formed from an elastomeric gel polymer, each tip having a radius of curvature of less than about 1 μ

m.

2. The tip array of claim 1, wherein the elastomeric gel polymer of the tips has a compression modulus of about 10 MPa to about 300 MPa.

4. The tip array of claim 1, wherein each tip has a radius of curvature of less than about 0.5 μ

m.

5. The tip array of claim 4, wherein each tip has a radius of curvature of less than about 100 nm.

6. The tip array of claim 1, wherein the tips are arranged in a regular periodic pattern.

7. The tip array of claim 1, wherein the tips are identically-shaped.

8. The tip array of claim 1, wherein the tips are pyramidal.

9. The tip array of claim 1, wherein the thickness of the common substrate layer is about 1 mm to about 5 mm.

10. The tip array of claim 1, further comprising a rigid support to which the common substrate is adhered.

11. The tip array claim 1, wherein the tip array, common substrate layer, and rigid support are at least translucent.

12. The tip array of claim 1, wherein the common substrate layer and tips have a combined thickness of less than about 5 mm.

13. The tip array of claim 12, wherein the combined thickness is less than about 1 mm.

14. The tip array of claim 13, wherein the combined thickness is about 200 μ

m.

15. The tip array of claim 1, wherein the elastomeric gel polymer is selected from the group consisting of polysaccharide gels, polyethylene oxide gels, polyAMPS gels, polyvinylpyrrolidone gels, methylcellulose gels, hyaluronan gels, and combinations thereof.

16. The tip array of claim 15, wherein the polysaccharide is unbranched.

17. The tip array of claim 16, wherein the polysaccharide is agarose.

18. The tip array of claim 1, wherein each tip has a radius of curvature of less than about 0.2 μ

m.

19. The tip array of claim 1, wherein the elastomeric gel polymer is Hookean under pressures of 10 MPa to 300 MPa.

20. A method for sub-micron scale printing of indicia on a substrate surface, comprising:

coating a tip array of claim 1; and

contacting the substrate surface for a first contacting period of time and at a first contacting pressure with all or substantially all of the coated tips of the array to deposit the patterning composition onto the substrate surface and form substantially uniform indicia with all or substantially all of said coated tips, the indicia having a dot size (or line width) of less than 1 μ

m.

21. The method of claim 20, wherein the patterning composition is a biomaterial having an activity, and wherein the activity is preserved when depositing the patterning composition onto the substrate surface.

22. The method of claim 20, wherein the patterning composition is free of exogenous patterning composition carriers.

23. The method of claim 20, comprising coating by adsorbing or absorbing the patterning composition onto the tip array.

24. The method of claim 20, further comprising moving the tip array, the substrate surface, or both and repeating the contacting step for a second contacting period of time and at a second contacting pressure.

25. The method of claim 24, wherein the first contacting period of time and the second contacting period of time are equal.

26. The method of claim 24, wherein the first contacting period of time and the second contacting period of time are different.

27. The method of claim 24, wherein the first contacting pressure and the second contacting pressure are the same.

28. The method of claim 24, wherein the first contacting pressure and the second contacting pressure are different.

29. The method of claim 20, further comprising controlling a z-piezo of a piezo scanner upon which the substrate or the tip array is mounted to control the contacting pressure.

30. The method of claim 20, comprising moving the tip array and holding the substrate surface stationary.

31. The method of claim 20, comprising holding the tip array stationary and moving the substrate surface.

32. The method of claim 20, comprising moving both the tip array and the substrate surface.

33. The method of claim 20, comprising limiting lateral movement between the tip array and the substrate to form indicia comprising dots.

34. The method of claim 33, comprising controlling the contacting period of time, the contacting pressure, or both, to form the dots with a diameter in a range of about 10 nm to about 500 μ

m.

35. The method of claim 20, comprising controlling lateral movement between the tip array and the substrate surface during contacting and/or between one or more sets of contacting and depositing steps to form indicia comprising one or more of lines and a preselected pattern.

36. The method claim 20, comprising contacting each tip of the tip array with the substrate surface.

37. The method of claim 20, wherein the indicia have a dot size (or line width) of less than 900 nm.

38. The method of claim 20, wherein the indicia have a dot size (or line width) of less than 100 nm.

39. The method of claim 20, further comprising leveling the tips of the tip array with respect to the substrate surface by

backlighting the tip array with incident light to cause internal reflection of the incident light from the internal surfaces of the tips;

bringing the tips of the tip array and the substrate surface together along a z-axis up to a point of contact between a subset of the tips with the substrate surface, contact indicated by increased intensity of reflected light from the subset of tips in contact with the substrate surface, whereas no change in the intensity of reflected light from other tips indicates non-contacting tips; and

tilting one or both of the tip array and the substrate surface with respect to the other in response to differences in intensity of the reflected light from the internal surfaces of the tips, to achieve contact between the substrate surface and non-contacting tips,

wherein said tilting is performed one or more times along x-, y-, and/or z-axes.

40. The method of claim 20, further comprising leveling the tips of the tip array with respect to the substrate surface by

backlighting the tip array with incident light to cause internal reflection of the incident light from the internal surfaces of the tips;

bringing the tips of the tip array and the substrate surface together along a z-axis to cause contact between the tips of the tip array and the substrate surface;

further moving one or both of the tip array and the substrate towards the other along the z-axis to compress a subset of the tips, whereby the intensity of the reflected light from the tips increases as a function of the degree of compression of the tips against the substrate surface; and

tilting one or both of the tip array and the substrate surface with respect to the other in response to differences in intensity of the reflected light from internal surfaces of the tips, to achieve substantially uniform contact between the substrate surface and tips,

wherein said tilting is performed one or more times along x-, y- and/or z-axes.

3. A tip array comprising an at least translucent stacked structure comprising a plurality of gel polymer tips fixed to a common elastomeric gel polymer substrate, the substrate fixed to a glass slide.

41. A method of making a tip array, comprising:

forming a master comprising an array of recesses in a substrate separated by lands;

filling the recesses and covering the lands with a polymer gel mixture comprising a polymer gel material dispersed or dissolved in a solvent and, optionally, a buffer solution;

curing the polymer gel solution to form a polymer gel structure; and

separating the polymer gel structure from the master.

42. The method of claim 41, further comprising forming the recesses as pyramidal recesses by forming wells in the substrate and anisotropically wet-etching the substrate.

43. The method of claim 41, further comprising covering the filled and coated substrate with a planar glass layer prior to curing.

44. The method of claim 41, wherein the polymer gel material is selected from the group consisting of polysaccharide gels, polyethylene oxide gels, polyAMPS gels, polyvinylpyrrolidone gels, methylcellulose gels, hyaluronan gels, and combinations thereof.

45. The method of claim 44, wherein the polysaccharide is unbranched.

46. The method of claim 45, wherein the polysaccharide is agarose.