Organoaminosilane Precursors and Methods for Depositing Films Comprising Same
First Claim
1. An organoaminosilane precursor represented by the following formula I:
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Abstract
Described herein are precursors and methods of forming dielectric films. In one aspect, there is provided a silicon precursor having the following formula I:
wherein R1 is independently selected from hydrogen, a linear or branched C1 to C6 alkyl, a linear or branched C2 to C6 alkenyl, a linear or branched C2 to C6 alkynyl, a C1 to C6 alkoxy, a C1 to C6 dialkylamino and an electron withdrawing group and n is a number selected from 0, 1, 2, 3, 4, and 5; and R2 is independently selected from hydrogen, a linear or branched C1 to C6 alkyl, a linear or branched C2 to C6 alkenyl, a linear or branched C2 to C6 alkynyl, a C1 to C6 alkoxy, a C1 to C6 dialkylamino, a C6 to C10 aryl, a linear or branched C1 to C6 fluorinated alkyl, and a C4 to C10 cyclic alkyl group.
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Citations
51 Claims
- 1. An organoaminosilane precursor represented by the following formula I:
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9. A method for forming a dielectric film on at least one surface of a substrate by a deposition process chosen from a chemical vapor deposition process and an atomic layer deposition process, the method comprising:
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providing the at least one surface of the substrate in a reaction chamber; introducing at least one organoaminosilane precursor having the following formula I in the reactor; - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A method of forming a dielectric film via an atomic layer deposition (ALD) process, the method comprising the steps of:
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a. providing a substrate in an ALD reactor; b. providing in the ALD reactor an at least one organoaminosilane precursor having the following formula I; - View Dependent Claims (17, 18, 19, 20, 21, 22)
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23. A method of forming a dielectric film onto at least a surface of a substrate using a plasma enhanced atomic layer deposition (PEALD) process, the method comprising:
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a. providing a substrate in an ALD reactor; b. providing in the ALD reactor an at least one organoaminosilane precursor having the following formula I; - View Dependent Claims (24, 25, 26, 27, 28, 29)
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30. A method for forming a silicon oxide film on a substrate comprising:
reacting an oxidizing agent with a precursor comprising an organoaminosilane represented by the following formula I; - View Dependent Claims (31, 32, 33, 34, 35)
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36. A method for forming a silicon oxide film on a substrate comprising:
forming via vapor deposition of the silicon oxide film on the substrate from a composition comprising at least one organoaminosilane precursor having the following Formula I; - View Dependent Claims (37, 38, 39, 40)
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41. A method for forming a silicon oxide film on a substrate comprising:
introducing an organoaminosilane represented by the following formula I;
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42. A method for forming a silicon oxide film on a substrate wherein the film comprises a thickness, the method comprising:
a. introducing an at least one organoaminosilane represented by the formula I into a deposition chamber; - View Dependent Claims (43, 44, 45, 46, 47, 48, 49)
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50. A vessel which is used to deliver a precursor for the deposition of a silicon-containing film, the vessel comprising:
the precursor represented by the following formula I; - View Dependent Claims (51)
Specification