Apparatus and Method For Incorporating Composition Into Substrate Using Neutral Beams

• US 20120129347A1
• Filed: 11/10/2011
• Published: 05/24/2012
• Est. Priority Date: 02/11/2008
• Status: Abandoned Application

• Current Assignee: SungKyunKwan University's Research & Business Foundation (SungKyunKwan University)
• Original Assignee: SungKyunKwan University's Research & Business Foundation (SungKyunKwan University)
• Inventors: Yeom, Geun-Young, Kim, Sung-Woo, Park, Byoung-Jae
• Application Number:
  US13/293,953
• Publication Number:
  US 20120129347A1
• Time in Patent Office: Days
• US Class Current: 438/694
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32422 Arrangement for selecting ions or species in the plasma
• CPC Class Codes: H01L 21/02321 introduction of substances into an already existing insulating layer H01L21/02227 and subgroups take precedence
• CPC Class Codes: H01L 21/02323 introduction of oxygen
• CPC Class Codes: H01L 21/02329 introduction of nitrogen
• CPC Class Codes: H01L 21/31155 by ion implantation
• CPC Class Codes: H01L 29/40117 the electrodes comprising a charge-trapping insulator

Abstract

An apparatus and method for processing a surface of a substrate using neutral beams are provided to repeatedly process an oxide layer using the neutral beams having low energy to minimize electrical damage to the oxide layer and improve characteristics of the oxide layer. The apparatus is mounted in a plasma generating chamber, and includes: an ion beam generating gas inlet, which injects a gas for generating ion beams; an ion source, which generates the ion beams having a polarity from the gas introduced through the ion beam generating gas inlet; a grid assembly, which is installed on one end of the ion source; a reflector, which is aligned with the grid assembly and converts the ion beams to the neutral beams; and a stage, on which the substrate is placed on a traveling path of the neutral beams.

Claims

1. A method of processing a surface of a substrate using neutral beams, comprising the steps of:

(a) forming an oxide layer on the substrate;

(b) applying the neutral beams to the oxide layer to incorporate at least one of O, N and F elements into the oxide layer; and

wherein the neutral beams are generated through the steps of;

injecting a gas including at least one of O₂, N₂, C_XF_Y (where x=1 to 4, y=2 to

     8) and NF₃ for generating ion beams through an inlet into an ion source;

generating the ion beams having a polarity from the injected gas in the ion source; and

converting the ion beams into the neutral beams containing at least one of O, N and F elements.

2. The method of claim 1, wherein the step (a) and (b) are repeated at least one time.

3. The method of claim 1, wherein the substrate is formed of SiO₂.

4. The method of claim 1, wherein the substrate is formed of Al₂O₃, HfO₂, TiO₂, ZrO₂, Y₂O₃, Ta₂O₅, BeO or La₂O₃.

5. The method of claim 4, wherein one of a SONOS (silicon-oxide-nitride-oxide-silicon) structure, a TANOS (tantalium-aluminium oxide-nitride-oxide-silicon) structure, or a SANOS (silicon-aluminium oxide-nitride-oxide-silicon) structure is formed on the substrate.

6. The method of claim 1, wherein the neutral beams have an energy below 100 eV.

7. The method of claim 1, wherein the neutral beams have the energy of 10 eV

8. The method of claim 3, wherein one of a SONOS (silicon-oxide-nitride-oxide-silicon) structure, a TANOS (tantalium-aluminium oxide-nitride-oxide-silicon) structure, or a SANOS (silicon-aluminium oxide-nitride-oxide-silicon) structure is formed on the substrate.