TILEABLE SENSOR ARRAY

• US 20120133001A1
• Filed: 11/30/2010
• Published: 05/31/2012
• Est. Priority Date: 11/30/2010
• Status: Active Grant

• Current Assignee: General Electric Company
• Original Assignee: General Electric Company
• Inventors: Tkaczyk, John Eric, Smith, Lowell Scott, Baumgartner, Charles Edward, Wodnicki, Robert Gideon, Fisher, Rayette Ann, Woychik, Charles Gerard, Lewandowski, Robert Stephen
• Granted Patent: US 8,659,148 B2
• Time in Patent Office: Days
• US Class Current: 257/414
• CPC Class Codes: A61B 8/4483 characterised by features of the ultrasound transducer
• CPC Class Codes: H01L 2224/16225 the item being non-metallic, e.g. insulating substrate with or without metallisation
• CPC Class Codes: H01L 27/14634 Assemblies, i.e. Hybrid structures
• CPC Class Codes: H01L 27/14658 X-ray, gamma-ray or corpuscular radiation imagers measuring X-, gamma- or corpuscular radiation G01T1/00
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/01322 Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
• CPC Class Codes: H01L 2924/1461 MEMS
• CPC Class Codes: H10N 39/00 Integrated devices, or assemblies of multiple devices, comprising at least one piezoelectric, electrostrictive or magnetostrictive element covered by groups H10N30/00 – H10N35/00

Abstract

A method for forming a tileable detector array is presented. The method includes forming a detector module, where forming the detector module includes providing a sensor array having a first side and a second side, where the sensor array includes a first plurality of contact pads disposed on the second side of the sensor array, disposing the sensor array on an interconnect layer, where the interconnect layer includes a redistribution layer having a first side and a second side, where the redistribution layer includes a second plurality of contact pads disposed on the first side, an integrated circuit having a plurality of through vias disposed therethrough, where a first side of the integrated circuit is operationally coupled to the second side of the redistribution layer, where the sensor array is disposed on the interconnect layer such that the first plurality of contact pads on the second side of the sensor array are aligned with the second plurality of contact pads on the first side of the redistribution layer, operationally coupling the first plurality of contact pads on the second side of the sensor array to the second plurality of contact pads on the redistribution layer to form a sensor stack, coupling the sensor stack to a substrate to form the detector module, and tiling a plurality of detector modules on a second substrate to form the tileable detector array.

Claims

1. A method for forming a tileable detector array, comprising:

forming a detector module, comprising;

providing a sensor array having a first side and a second side, wherein the sensor array comprises a first plurality of contact pads disposed on the second side of the sensor array;

disposing the sensor array on an interconnect layer, wherein the interconnect layer comprises;

a redistribution layer having a first side and a second side, wherein the redistribution layer comprises a second plurality of contact pads disposed on the first side of the redistribution layer;

an integrated circuit having a plurality of through vias disposed therethrough, wherein a first side of the integrated circuit is operationally coupled to the second side of the redistribution layer,

wherein the sensor array is disposed on the interconnect layer such that the first plurality of contact pads on the second side of the sensor array is aligned with the second plurality of contact pads on the first side of the redistribution layer;

operationally coupling the first plurality of contact pads on the second side of the sensor array to the second plurality of contact pads on the first side of the redistribution layer to form a sensor stack;

coupling the sensor stack to a first substrate to form the detector module; and

tiling a plurality of detector modules on a second substrate to form the tileable detector array.

2. The method of claim 1, wherein the sensor array comprises an ultrasound transducer array, a computed tomography detector array, an X-ray detector array, a positron emission tomography detector array, a photo-acoustic tomography detector array, or combinations thereof.

3. The method of claim 1, wherein the redistribution layer is configured to match an interface of the sensor array to an interface of the interconnect layer.

4. The method of claim 1, wherein operationally coupling the first plurality of contact pads on the second side of the sensor array to the second plurality of contact pads on the first side of the redistribution layer comprises employing a high temperature flip chip attach process to form the sensor stack.

5. The method of claim 1, wherein tiling the plurality of detector modules comprises using a flip chip attach process to attach the plurality of detector modules to the second substrate.

6. The method of claim 1, further comprising disposing a plurality of solder balls, a plurality of pins or a combination thereof on a second side of the second substrate to form a pluggable detector module.

7. The method of claim 6, further comprising disposing a plurality of pluggable detector modules on a third substrate to form a field replaceable unit.

8. The method of claim 7, further comprising operationally coupling the plurality of pluggable detector modules to the third substrate using solder bumps, stud bumps, posts, or combinations thereof.

9. The method of claim 1, further comprising coupling processing circuitry to a second side of the second substrate, wherein the processing circuitry comprises control electronics, front-end electronics, or both control electronics and front-end electronics.

10. The method of claim 9, wherein the coupling the processing circuitry to the second side of the second substrate comprises using solder bumps, stud bumps, posts, or combinations thereof.

11. A tileable detector array, comprising:

a first substrate having a first side and a second side;

a plurality of detector modules arranged on the first side of the first substrate, wherein each of the plurality of detector modules comprises;

a sensor array having a first side and a second side, wherein a first plurality of contact pads is disposed on the second side of the sensor array;

an interconnect layer comprising;

a redistribution layer having a first side and a second side, wherein the redistribution layer comprises a second plurality of contact pads disposed on the first side of the redistribution layer;

an integrated circuit having a plurality of through vias disposed therethrough, wherein a first side of the integrated circuit is operationally coupled to the second side of the redistribution layer,

wherein the sensor array is disposed on the interconnect layer such that the first plurality of contact pads on the second side of the sensor array is aligned with the second plurality of contact pads on the first side of the redistribution layer, and wherein the first plurality of contact pads on the second side of the sensor array is operationally coupled to the second plurality of contact pads on the redistribution layer; and

coupling means disposed on a second side of the integrated circuit,

wherein the plurality of detector modules is coupled to the first side of the first substrate via the coupling means disposed on the second side of the integrated circuit.

12. The tileable detector array of claim 11, further comprising a plurality of pins, a plurality of solder balls, or a combination thereof disposed on the second side of the substrate to form a pluggable detector module.

13. The tileable detector array of claim 12, further comprising a second substrate operatively coupled to one or more pluggable detector modules to form a field replaceable unit.

14. The tileable detector array of claim 13, wherein the second substrate comprises signal routing for supplying power and ground and signal transmission to and from the one or more pluggable detector modules.

15. The tileable detector array of claim 11, wherein the integrated circuit comprises a plurality of through vias disposed in a patterned arrangement on the first side and the second side of the integrated circuit.

16. The tileable detector array of claim 15, wherein the patterned arrangement of the through vias on the first side the integrated circuit is different from the patterned arrangement of through vias on the second side of the integrated circuit.

17. The tileable detector array of claim 16, wherein the patterned arrangement of through vias on the integrated circuit comprises a two-sided pattern of through vias, a partial array of through vias, a full array of through vias, a pattern of through vias disposed along the perimeter of the integrated circuit, or combinations thereof.

18. The tileable detector array of claim 11, further comprising an interposer disposed between the sensor array and the interconnect layer.

19. The tileable detector array of claim 11, wherein the first substrate comprises a ceramic substrate or an organic substrate.

20. The tileable detector array of claim 11, further comprising processing circuitry coupled to the second side of the first substrate.

21. The tileable detector array of claim 20, wherein the processing circuitry is coupled to the second side of the first substrate using solder bumps, stud bumps, posts, or combinations thereof.

22. A method for forming a detector module, comprising:

providing a sensor array having a first side and a second side, wherein the sensor array comprises a first plurality of contact pads disposed on the second side of the sensor array;

providing an interposer having a first side and a second side, wherein the interposer comprises a first set of contact pads disposed on the first side of the interposer and a second set of contact pads on the second side of the interposer;

affixing a first support structure to the second side of the interposer;

coupling the sensor array to the first side of the interposer by affixing the first plurality of contact pads disposed on the second side of the sensor array to the first set of contact pads disposed on the first side of the interposer to form a sensor array interposer stack;

affixing a second support structure to the first side of the interposer;

sawing off the first support structure;

attaching the sensor array interposer stack to an interconnect layer to form a sensor stack; and

coupling the sensor stack to a substrate to form the detector module.

23. The method of claim 22, wherein coupling the sensor array to the interposer comprises employing a high temperature attach process.

24. The method of claim 22, wherein attaching the first support structure to the second side of the interposer comprises using a low temperature attach process.

25. The method of claim 22, wherein attaching the second support structure to the first side of the interposer comprises using a low temperature attach process.

26. The method of claim 22, wherein coupling the sensor stack to the interconnect layer comprises:

disposing stud bumps, pillars or a combination thereof on the second set of contact pads on the second side of the interposer; and

affixing the sensor stack to the interconnect layer using the stud bumps, the pillars or both the stud bumps and the pillars employing a low temperature attach process.

27. The method of claim 22, wherein the interposer comprises an organic interposer having through vias filled with an epoxy.