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TILEABLE SENSOR ARRAY

  • US 20120133001A1
  • Filed: 11/30/2010
  • Published: 05/31/2012
  • Est. Priority Date: 11/30/2010
  • Status: Active Grant
First Claim
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1. A method for forming a tileable detector array, comprising:

  • forming a detector module, comprising;

    providing a sensor array having a first side and a second side, wherein the sensor array comprises a first plurality of contact pads disposed on the second side of the sensor array;

    disposing the sensor array on an interconnect layer, wherein the interconnect layer comprises;

    a redistribution layer having a first side and a second side, wherein the redistribution layer comprises a second plurality of contact pads disposed on the first side of the redistribution layer;

    an integrated circuit having a plurality of through vias disposed therethrough, wherein a first side of the integrated circuit is operationally coupled to the second side of the redistribution layer,wherein the sensor array is disposed on the interconnect layer such that the first plurality of contact pads on the second side of the sensor array is aligned with the second plurality of contact pads on the first side of the redistribution layer;

    operationally coupling the first plurality of contact pads on the second side of the sensor array to the second plurality of contact pads on the first side of the redistribution layer to form a sensor stack;

    coupling the sensor stack to a first substrate to form the detector module; and

    tiling a plurality of detector modules on a second substrate to form the tileable detector array.

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