Apparatus and Method for Anchoring Electrodes in MEMS Devices
First Claim
Patent Images
1. A MEMS device comprising:
- a movable mass; and
at least one electrode configured to interact with the mass, the electrode having a top surface substantially parallel with a top surface of the movable mass and a bottom surface substantially parallel with a bottom surface of the movable mass, wherein the top surface of the electrode is anchored to a overlying support structure and wherein the bottom surface of the electrode is anchored to an underlying support structure in order to constrain movement of the electrode.
1 Assignment
0 Petitions
Accused Products
Abstract
One or more electrodes that interact with a movable mass in a MEMS device are anchored or otherwise supported from both the top and bottom and optionally also from one or more of the lateral sides other than the transduction side (i.e., the side of the electrode facing the mass) in order to severely restrict movement of the electrodes such as from interaction with the mass and/or external forces.
-
Citations
23 Claims
-
1. A MEMS device comprising:
-
a movable mass; and at least one electrode configured to interact with the mass, the electrode having a top surface substantially parallel with a top surface of the movable mass and a bottom surface substantially parallel with a bottom surface of the movable mass, wherein the top surface of the electrode is anchored to a overlying support structure and wherein the bottom surface of the electrode is anchored to an underlying support structure in order to constrain movement of the electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A MEMS gyroscope comprising:
-
a resonant mass; and at least one electrode configured to interact with the mass, the electrode having a top surface substantially parallel with a top surface of the movable mass and a bottom surface substantially parallel with a bottom surface of the movable mass, wherein the top surface of the electrode is anchored to a overlying support structure and wherein the bottom surface of the electrode is anchored to an underlying support structure in order to constrain movement of the electrode. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
-
-
22. A method for forming a MEMS device having a movable mass and at least one electrode configured to interact with the mass, the electrode having a top surface substantially parallel with a top surface of the movable mass and a bottom surface substantially parallel with a bottom surface of the movable mass the method comprising:
-
anchoring the top surface of the electrode to a overlying support structure; and anchoring the bottom surface of the electrode to an underlying support structure in order to constrain movement of the electrode. - View Dependent Claims (23)
-
Specification