Non-Degenerate Mode MEMS Gyroscope
First Claim
1. A microelectromechanical systems (MEMS) gyroscope, comprising:
- a substrate;
a primary member attached to the substrate and configured to vibrate in a first bulk acoustic mode at a drive frequency in response to a varying electrostatic signal and to vibrate in a second bulk acoustic mode, different than the first bulk acoustic mode, at the drive frequency in response to the primary member being rotated about an axis, wherein the first bulk acoustic mode and the second bulk acoustic mode are non-degenerate.
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Abstract
Bulk acoustic wave (BAW) gyroscopes purposefully operate using non-degenerate modes, i.e., resonant frequencies of drive and sense modes are controlled so they are not identical. The resonant frequencies differ by a small controlled amount (Δf). The difference (Δf) is selected such that the loss of sensitivity, as a result of using non-degenerate modes, is modest. Non-degenerate operation can yield better bandwidth and improves signal-to-noise ratio (SNR) over comparable degenerate mode operation. Increasing Q of a BAW resonator facilitates trading bandwidth for increased SNR, thereby providing a combination of bandwidth and SNR that is better than that achievable from degenerate mode devices. In addition, a split electrode configuration facilitates minimizing quadrature errors in BAW resonators.
24 Citations
22 Claims
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1. A microelectromechanical systems (MEMS) gyroscope, comprising:
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a substrate; a primary member attached to the substrate and configured to vibrate in a first bulk acoustic mode at a drive frequency in response to a varying electrostatic signal and to vibrate in a second bulk acoustic mode, different than the first bulk acoustic mode, at the drive frequency in response to the primary member being rotated about an axis, wherein the first bulk acoustic mode and the second bulk acoustic mode are non-degenerate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A microelectromechanical systems (MEMS) gyroscope, comprising:
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a bulk acoustic resonator; at least one first electrode coupled to the bulk acoustic resonator, the at least one first electrode being positioned to excite vibration of the bulk acoustic resonator in a first bulk acoustic wave mode; and at least one second electrode coupled to the bulk acoustic resonator, the at least one second electrode being positioned to detect vibration of the bulk acoustic resonator in a second bulk acoustic mode, the first and second bulk acoustic wave modes being non-degenerate.
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12. A method for sensing angular rotation, the method comprising:
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applying a varying electrostatic signal to a primary member to cause the primary member to vibrate in a first bulk acoustic mode at a drive frequency; rotating the primary member; and sensing a second bulk acoustic mode vibration of the primary member at the drive frequency, the first bulk acoustic mode being different than the second bulk acoustic mode, the first bulk acoustic mode and the second bulk acoustic mode being non-degenerate.
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13. A microelectromechanical systems (MEMS) gyroscope, comprising:
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a bulk acoustic resonator configured to vibrate in a first bulk acoustic mode in response to a varying electrostatic signal; and a split electrode disposed proximate a desired location of an anti-node of the first bulk acoustic mode, the split electrode comprising at least two electrodes disposed symmetrically about the desired location of the anti-node. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification