DEEP-TRENCH SILICON ETCHING AND GAS INLET SYSTEM THEREOF
First Claim
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1. A deep-trench silicon etching apparatus comprising:
- a reaction chamber; and
a gas source cabinet;
a first gas path, anda second gas path, the second gas path being independently controlled from the first gas path;
the gas source cabinet being connected to the reaction chamber by the two independently controlled gas paths;
wherein, the first gas path is used to introduce process gas for an etch step from the gas source cabinet into the reaction chamber; and
the second gas path is used to introduce process gas for deposition step from the gas source cabinet into the reaction chamber.
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Abstract
A deep-trench silicon etching apparatus, including a reaction chamber and a gas source cabinet, the gas source cabinet is connected to the reaction chamber via two independently controlled gas paths; wherein, a first gas path is used to introduce process gas for etch step from the gas source cabinet into the reaction chamber; a second gas path is used to introduce process gas for deposition step from the gas source cabinet into the reaction chamber. The present invention is used to solve the problems of gas mixture and gas delay occurring when process steps are switched.
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Citations
12 Claims
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1. A deep-trench silicon etching apparatus comprising:
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a reaction chamber; and a gas source cabinet; a first gas path, and a second gas path, the second gas path being independently controlled from the first gas path; the gas source cabinet being connected to the reaction chamber by the two independently controlled gas paths; wherein, the first gas path is used to introduce process gas for an etch step from the gas source cabinet into the reaction chamber; and
the second gas path is used to introduce process gas for deposition step from the gas source cabinet into the reaction chamber. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A gas inlet system of a deep-trench silicon etching comprising:
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a gas source cabinet; a reaction chamber; and a first gas path; a second gas path, independently controlled from the first gas path, each of the first gas path and second gas path being connected between the gas source cabinet and the reaction chamber; wherein, the first gas path is used to introduce a process gas for an etch step from the gas source cabinet into the reaction chamber; and
the second gas path is used to introduce a process gas for a deposition step from the gas source cabinet into the reaction chamber. - View Dependent Claims (8, 9, 10, 11, 12)
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Specification