Self-Aligned Contact For Replacement Gate Devices
First Claim
1. A method of forming a semiconductor structure comprising:
- forming a gate electrode and a planarization dielectric layer on a semiconductor substrate, wherein a top metallic surface of said gate electrode is coplanar with a top surface of said planarization dielectric layer;
recessing a top surface of said gate electrode relative to said top surface of said planarization dielectric layer;
forming an etch stop layer contiguously on said recessed top surface of said gate electrode and on said top surface of said planarization dielectric layer, wherein said etch stop layer includes a first portion located on said planarization dielectric layer and a second portion located on said gate electrode and having a vertically offset bottom surface relative to an interface between said planarization dielectric layer and said first portion;
forming a contact-level dielectric layer over said etch stop layer; and
forming a via hole extending at least through said contact-level dielectric layer, said first portion of said etch stop layer, and a portion of said planarization dielectric layer, wherein said via hole is vertically spaced from said gate electrode by said second portion of said etch stop layer.
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Abstract
A conductive top surface of a replacement gate stack is recessed relative to a top surface of a planarization dielectric layer by at least one etch. A dielectric capping layer is deposited over the planarization dielectric layer and the top surface of the replacement gate stack so that the top surface of a portion of the dielectric capping layer over the replacement gate stack is vertically recessed relative to another portion of the dielectric layer above the planarization dielectric layer. The vertical offset of the dielectric capping layer can be employed in conjunction with selective via etch processes to form a self-aligned contact structure.
137 Citations
20 Claims
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1. A method of forming a semiconductor structure comprising:
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forming a gate electrode and a planarization dielectric layer on a semiconductor substrate, wherein a top metallic surface of said gate electrode is coplanar with a top surface of said planarization dielectric layer; recessing a top surface of said gate electrode relative to said top surface of said planarization dielectric layer; forming an etch stop layer contiguously on said recessed top surface of said gate electrode and on said top surface of said planarization dielectric layer, wherein said etch stop layer includes a first portion located on said planarization dielectric layer and a second portion located on said gate electrode and having a vertically offset bottom surface relative to an interface between said planarization dielectric layer and said first portion; forming a contact-level dielectric layer over said etch stop layer; and forming a via hole extending at least through said contact-level dielectric layer, said first portion of said etch stop layer, and a portion of said planarization dielectric layer, wherein said via hole is vertically spaced from said gate electrode by said second portion of said etch stop layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A semiconductor structure comprising:
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a gate electrode located on a semiconductor substrate; a planarization dielectric layer laterally surrounding said gate electrode, wherein a top surface of said gate electrode is recessed relative to a top surface of said planarization dielectric layer; an etch stop layer contiguously located on said recessed top surface of said gate electrode and said top surface of said planarization dielectric layer, wherein said etch stop layer includes a first portion located on said planarization dielectric layer and a second portion located on said gate electrode and having a vertically offset bottom surface relative to an interface between said planarization dielectric layer and said first portion; a contact-level dielectric layer overlying said planarization dielectric layer; and a contact via structure extending through said contact-level dielectric layer, said etch stop layer, and said planarization dielectric layer, wherein a portion of said contact via structure overlies said gate electrode and is vertically spaced by said second portion of said etch stop layer. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification