ELECTROACTIVE POLYMER ACTUATOR AND METHOD OF MANUFACTURING THE SAME

• US 20120139393A1
• Filed: 09/08/2011
• Published: 06/07/2012
• Est. Priority Date: 12/07/2010
• Status: Active Grant

• Current Assignee: Industry Academic Cooperation Foundation, Samsung Electronics Co. Ltd.
• Original Assignee: Industry Academic Cooperation Foundation, Samsung Electronics Co. Ltd.
• Inventors: CHOI, Seung-Tae, KWON, Jong-Oh, PARK, Youn-Jung, PARK, Cheol-Min, CHOI, Yeon-Sik
• Granted Patent: US 8,564,181 B2
• Time in Patent Office: Days
• US Class Current: 310/366
• CPC Class Codes: H10N 30/05 Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
• CPC Class Codes: H10N 30/503 having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
• CPC Class Codes: H10N 30/857 Macromolecular compositions
• CPC Class Codes: H10N 30/874 embedded within piezoelectric or electrostrictive material, e.g. via connections
• CPC Class Codes: H10N 30/878 the principal material being non-metallic, e.g. oxide or carbon based

Abstract

A multilayered electroactive polymer (EAP) device and a method of manufacturing the same is provided. The multilayered EAP device includes a plurality of unit layers. Each unit layer includes an EAP layer formed of an electroactive polymer (EAP), a protecting layer configured to prevent a material from penetrating into the EAP layer, and an active electrode formed using a conductive material. The protecting layer may be formed below the active layer or above the active layer. The active electrode may be interposed between two protecting layers.

Claims

1. A multilayered electroactive polymer (EAP) device comprising a plurality of unit layers that are stacked on top of each other, in which each of the plurality of unit layers comprises:

an EAP layer formed of an electro-active polymer (EAP);

a protective layer configured to prevent a material from penetrating into the EAP layer; and

an active electrode.

2. The multilayered EAP device of claim 1, wherein the protective layer is formed on the EAP layer.

3. The multilayered EAP device of claim 1, wherein the protective layer is formed on the active electrode.

4. The multilayered EAP device of claim 1, wherein the protective layer comprises a first protective layer and a second protective layer, and the active electrode is disposed between the first protective layer and the second protective layer.

5. The multilayered EAP device of claim 1, wherein the protective layer is formed of a polymer which is not resoluble to a first solvent to which the EAP is resoluble.

6. The multilayered EAP device of claim 5, wherein the polymer of the protective layer is further resoluble to a second solvent to which the EAP is not resoluble.

7. The multilayered EAP device of claim 5, wherein the EAP layer is formed of polyvinylidene fluoride, polyvinylidene fluoride-trifluoroethylene polyvinylidene fluoride-trifluoroethylene-chlorofluoroethylene, or polyvinylidene fluoride-trifluoroethylene-chlorotrifluoroethylene,

and the protective layer includes at least one selected from the group consisting of polyvinylphenol, polymethylmethacrylate, polyvinylalcohol, polydimethylsiloxane, poly(4-vinylpyridine) and polyacrylic acid, and combinations thereof.

8. The multilayered EAP device of claim 1, wherein the active electrode is formed of a metal material or a conductive material, the metal material or the conductive material having a thickness of about 100 nm or less.

9. The multilayered EAP device of claim 1, wherein the metal material includes at least one selected from the group consisting of gold (Au), copper (Cu), silver (Ag), aluminum (Al), nickel (Ni), chrome (Cr), iron (Fe) and combinations thereof.

10. The multilayered EAP device of claim 8, wherein the conductive polymer includes at least one selected from the group consisting of polyaniline, polypyrrole, PEDOT[poly(3,4-ethylenedioxythiophene)]:

PSS[poly(4-styrenesulfonic acid)], and combinations thereof.

11. The multilayered EAP device of claim 1, wherein the EAP includes a silicone based dielectric elastomer or a polyurethane based dielectric elastomer.

12. The multilayered EAP device of claim 1, wherein the each of the plurality of unit layers further comprises an extension electrode that is electrically connected to the active electrode, wherein extension electrodes of two adjacent unit layers among the unit layers stacked on a top of each other are disposed opposite to each other with respect to the active electrodes.

13. The multilayered EAP device of claim 12, further comprising a common electrode that electrically connects a lateral surface to a top surface of each of the extension electrodes.

14. The multilayered EAP device of claim 13, further comprising an etch stopping layer which makes contact with one surface of the common electrode;

and

a via hole comprising a width which increases in an upward direction,

wherein the common electrode is disposed in the via hole.

15. The multilayered EAP device of claim 13, further comprising a plurality of non-active layers that are formed with one side having a step profile;

and

an etch stopping layer which is in contact with one surface of the common electrode, wherein the common electrode is formed on the one side of the non-active layers.

16. A method of manufacturing a multilayered electroactive polymer (EAP) device, the method comprising:

forming a first EAP layer by forming an EAP solution on a substrate in a first film shape and removing a solvent of the EAP solution;

forming a protective layer configured to prevent a material from penetrating into the first EAP layer;

forming an active electrode; and

forming a second EAP layer by forming the EAP solution on the protective layer in a second film shape and removing a solvent of the EAP solution.

17. The method of claim 16, wherein the protective layer is formed on the first EAP layer and the active electrode is formed on the protective layer.

18. The method of claim 16, wherein the active electrode is formed on the first EAP layer and the protective layer is formed on the first EAP layer, on which the active electrode is formed.

19. The method of claim 16, wherein the protective layer includes a first protective layer and a second protective layer, and the forming of the protective layer and the forming of the active electrode comprises:

forming the first protective layer on the first EAP layer;

forming the active electrode on the first protective layer; and

forming the second protective layer on the first protective layer, on which the active electrode is formed.

20. The method of claim 16, wherein the protective layer is formed of a polymer which is not resoluble to the solvent of the EAP solution.

21. The method of claim 20, wherein the protective layer is formed of a polymer which is resoluble to a solvent to which the EAP is not resoluble.

22. The method of claim 16, wherein in the forming of the first EAP layer and the second EAP layer, the EAP solution is formed in the first and the second film shapes through spin coating.

23. A multilayered electroactive polymer (EAP) device comprising:

a plurality of pairs of unit layers that are stacked on top of each other and is divided into an actuating area and a first non-actuating area and a second non-actuating area that are adjacent to two sides of the actuating area,

wherein each of the pairs of unit layers comprises;

a first EAP layer formed of an EAP;

a first protective layer configured to prevent a material from penetrating into the first EAP layer;

a first active electrode which extends from the actuating area to the first non-actuating area;

a second EAP layer formed of the EAP, the second layer being disposed on the first EAP layer;

a second protective layer configured to prevent a material from penetrating into the second EAP layer; and

a second active electrode which extends from the actuating area to the second non-actuating area.

24. The multilayered EAP device of claim 23, wherein the first protective layer is formed on the first EAP layer and the second protective layer is formed on the second EAP layer.

25. The multilayered EAP device of claim 23, wherein the first protective layer is formed on the first active electrode and the second protective layer is formed on the second active electrode.

26. The multilayered EAP device of claim 23, wherein the first protective layer is of a plurality of first protective layers and the second protective layer is of a plurality of second protective layers and each of the first active electrode and the second active electrode is formed between the first protective layer and the second protective layer.

27. The multilayered EAP device of claim 23, wherein the first protective layer and the second protective layer are formed of a polymer which is not resoluble to a first solvent, to which the EAP is resoluble, and is resoluble to a second solvent to which the EAP is not resoluble.

28. The multilayered EAP device of claim 23, wherein each of the pairs of unit layers further comprises:

a first extension electrode which is formed on the first non-actuating area and is electrically connected to the first active electrode; and

a second extension electrode which is formed on the second non-actuating area and is electrically connected to the second active electrode,

wherein the multilayered electroactive polymer device further comprises;

a first common electrode which electrically connects the first extension electrodes, which are stacked on top of each other in the first non-actuating area, to each other; and

a second common electrode which electrically connects the second extension electrodes, which are stacked on top of each other in the second non-actuating area, to each other.

29. The multilayered EAP device of claim 28, wherein a first via hole, which has a width which increases stepwise in an upward direction, is formed in the first non-actuating area of the plurality of pairs of unit layers to expose parts of upper surfaces of the first extension electrodes,

a second via hole, which has a width which increases stepwise in the upward direction, is formed in the second non-actuating area of the plurality of pairs of unit layers to expose parts of upper surfaces of the second extension electrodes, and

the first common electrode is formed in the first via hole and the second common electrode is formed in the second via hole.

30. The multilayered EAP device of claim 28, wherein the plurality of pairs of unit layers in the first non-actuating area are formed with one side having one step profile which exposes the parts of the upper surfaces of the first extension electrodes,

the plurality of pairs of unit layers in the second non-actuating area are formed with one side having another step profile which exposes the parts of the upper surfaces of the second extension electrodes, and

the first common electrode is formed on the one side of the plurality of pairs of unit layers in the first non-actuating area and the second common electrode is formed on the one side of the plurality of pairs of unit layers in the second non-actuating area.

31. A multilayered electroactive polymer (EAP) device comprising a plurality of unit layers that are stacked on top of each other, in which each of the plurality of unit layers comprises:

an EAP layer formed of an electro-active polymer selected from the group consisting of P(VDF-TrFE-CFE)(poly(vinylidene fluoride-trifluoroethylene-chlorofluoroethylene) and P(VDF-TrFE-CTFE) (poly(vinylidene fluoride-frifluoroethylene-chlorotrifluoroethylene);

a protective layer configured to prevent a material from penetrating into the EAP layer, selected from the group consisting of polyvinylphenol and polyacrylic acid; and

an active electrode.

32. A method of manufacturing a multilayered electroactive polymer (EAP) device, the method comprising:

forming a first EAP layer from an EAP selected from the group consisting of P(VDF-TrFE-CFE)(poly(vinylidene fluoride-trifluoroethylene-chlorofluoroethylene) and P(VDF-TrFE-CTFE)(poly(vinylidene fluoride-frifluoroethylene-chlorotrifluoroethylene) by forming a first EAP solution on a substrate in a first film shape and removing solvent from the first EAP solution;

forming a protective layer from a polymer selected from the group consisting of polyacrylic acid and polyvinylphenol, configured to prevent a material from penetrating into the first EAP layer;

forming an active electrode; and

forming a second EAP layer by forming a second EAP solution of an EAP selected from the group consisting of P(VDF-TrFE-CFE)(poly(vinylidene fluoride-trifluoroethylene-chlorofluoroethylene) and P(VDF-TrFE-CTFE)(poly(vinylidene fluoride-frifluoroethylene-chlorotrifluoroethylene) on the protective layer in a second film shape and removing solvent from the second EAP solution.

33. A multilayered electroactive polymer (EAP) device comprising:

a plurality of pairs of unit layers that are stacked on top of each other and is divided into an actuating area and a first non-actuating area and a second non-actuating area that are adjacent to two sides of the actuating area,

wherein each of the pairs of unit layers comprises;

a first EAP layer formed of an EAP;

a first protective layer configured to prevent a material from penetrating into the first EAP layer;

a first active electrode which extends from the actuating area to the first non-actuating area;

a second EAP layer formed of the EAP, the second layer being disposed on the first EAP layer;

a second protective layer configured to prevent a material from penetrating into the second EAP layer; and

a second active electrode which extends from the actuating area to the second non-actuating area;

wherein each of the EAP layers independently comprises an EAP selected from the group consisting of P(VDF-TrFE-CFE)(poly(vinylidene fluoride-trifluoroethylene-chlorofluoroethylene) and P(VDF-TrFE-CTFE)(poly(vinylidene fluoride-frifluoroethylene-chlorotrifluoroethylene); and

wherein each of the protective layers independently comprises a polymer selected from the group consisting of polyacrylic acid and polyvinylphenol.