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X-RAY DIFFRACTION APPARATUS AND X-RAY DIFFRACTION MEASUREMENT METHOD

  • US 20120140890A1
  • Filed: 12/05/2011
  • Published: 06/07/2012
  • Est. Priority Date: 12/06/2010
  • Status: Active Grant
First Claim
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1. An X-ray diffraction apparatus comprising:

  • X-ray topography means for providing a spatial geometric correspondence to an X-ray exiting from a planar region of a sample to detect the X-ray as a planar X-ray topograph, andoutputting the X-ray topograph as a signal;

    optical image-capturing means for receiving a light-image of the planar region of the sample and outputting the light-image as a signal specified by planar positional information; and

    video synthesis means for generating synthesized video data on the basis of an output signal from the X-ray topograph and an output signal from the optical image-capturing means.

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