METHOD FOR MANUFACTURING A MICROMECHANICAL COMPONENT HAVING A VOLUME-ELASTIC MEDIUM AND MICROMECHANICAL COMPONENT

• US 20120144915A1
• Filed: 02/22/2012
• Published: 06/14/2012
• Est. Priority Date: 11/29/2007
• Status: Active Grant

• Current Assignee: Christian Ohl, Juergen Kurle, Wolf-Ingo Ratzel
• Original Assignee: Christian Ohl, Juergen Kurle, Wolf-Ingo Ratzel
• Inventors: Ohl, Christian, Kurle, Juergen, RATZEL, Wolf-Ingo
• Granted Patent: US 8,528,402 B2
• Time in Patent Office: Days
• US Class Current: 73/488
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/0264 Pressure sensors
• CPC Class Codes: B81B 3/0078 Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
• CPC Class Codes: B81B 7/0077 Other packages not provided for in groups B81B7/0035 - B81B7/0074
• CPC Class Codes: G01P 1/023 for acceleration measuring devices

Abstract

A method for manufacturing a micromechanical component is described, the micromechanical component having a medium. The medium has settable and changeable volume-elastic properties and generally completely encloses a sensor module and/or a module housing. The medium preferably has a low-pass response.

Claims

1. A method for manufacturing a micromechanical component, comprising:

positioning a sensor module or a module housing enclosing the sensor module in relation to an external housing; and

enclosing completely at least one of the sensor module and the module housing a volume-elastic medium.

2. The method as recited in claim 1, wherein the medium acts as a frequency filter through at least one of i) a selection of properties of the medium, and ii) a selection of manufacturing parameters during the manufacturing of the micromechanical component.

3. The method as recited in claim 2, wherein the medium acts as a low-pass filter.

4. The method as recited in claim 1, wherein at least one of:

i) the sensor module is fastened by the medium in the module housing, and ii) the module housing is fastened by the medium in the external housing.

5. The method as recited in claim 1, wherein a viscosity of the medium rises during the manufacturing of the micromechanical component.

6. The method as recited in claim 1, wherein the medium is pre-tensioned during the manufacturing of the micromechanical component.

7. The method as recited in claim 1, further comprising:

producing bubbles in the medium in a precursor stage of the medium.

8. The method as recited in claim 1, further comprising:

admixing bubbles in a precursor stage of the medium.

9. The method as recited in claim 7, wherein the bubbles are changed as a function of manufacturing parameters during the manufacturing of the micromechanical component.

10. The method as recited in claim 1, wherein the external housing is formed by extrusion coating the medium.

11. The method as recited in claim 7, wherein a protective layer is at least partially produced around the medium.

12. The method as recited in claim 11, wherein the bubbles remain unchanged during the manufacturing of the micromechanical component at least in the area of the protective layer.

13. A micromechanical component, comprising:

a housing;

a sensor module positioned in the housing; and

a volume-elastic medium enclosing completely the sensor, the medium having a frequency filtering response.

14. The micromechanical component as recited in claim 13, wherein the medium comprises a first medium and a second medium, the first medium having at least one of a different chemical and different physical properties, than the second medium.

15. The micromechanical component as recited in claim 14, wherein at least one of the first medium and the second medium have bubbles.

16. The micromechanical component as recited in claim 13, wherein the medium fills up all intermediate spaces between the sensor module and the external housing in the micromechanical component.

17. The micromechanical component as recited in claim 13, wherein the sensor is a pressure sensor.

18. The micromechanical component as recited in claim 13, wherein the sensor is an acceleration sensor.

19. A micromechanical component, comprising:

an external housing;

a sensor module;

a module housing enclosing the sensor module, the module housing being positioned in the external housing; and

a volume-elastic medium completely enclosing the module housing, the medium having a frequency filtering response.