Absorption cell and manufacturing method thereof
First Claim
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1. An absorption cell comprising:
- a first absorption layer formed of a first absorbent; and
a second absorption layer formed of a second absorbent having a higher density than the first absorbent and coated on the surface of the first absorption layer so as to prevent generation of dust particles from the first absorption layer.
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Abstract
An absorption cell includes a first absorption layer formed of a first absorbent, and a second absorption layer formed of a second absorbent having a higher density than the first absorbent and coated on the surface of the first absorption layer so as to prevent generation of dust particles from the first absorption layer. The upper surface of the first absorption layer is coated with the second absorption layer formed of the high-density absorbent, thereby preventing generation of minute dust particles and thus preventing secondary contamination.
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Citations
23 Claims
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1. An absorption cell comprising:
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a first absorption layer formed of a first absorbent; and a second absorption layer formed of a second absorbent having a higher density than the first absorbent and coated on the surface of the first absorption layer so as to prevent generation of dust particles from the first absorption layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An absorption cell comprising:
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a first absorption layer formed of a mixture of a first absorbent and a second absorbent having a higher density than the first absorbent; and a second absorption layer formed of the second absorbent having a higher density than the first absorbent and surrounding the surface of the second absorption layer so as to prevent generation of dust particles from the first absorption layer. - View Dependent Claims (10, 11, 12)
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13. A manufacturing method of an absorption cell comprising:
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preparing a first absorption layer formed of a first absorbent; coating the surface of the first absorption layer with a protective layer formed of a low-carbonizing point material and a second absorbent having a higher density than the first absorbent so as to prevent generation of dust particles from the first absorption layer; and removing the low-carbonizing point material from the protective layer so as to form a second absorption layer including a plurality of pore parts through which a fluid flows to the first absorption layer. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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20. A manufacturing method of an absorption cell comprising:
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preparing a first absorption layer formed of a mixture of a first absorbent and a second absorbent having a higher density than the first absorbent; coating the surface of the first absorption layer with a protective layer formed of a low-carbonizing point material and the second absorbent so as to prevent generation of dust particles from the first absorption layer; and removing the low-carbonizing point material from the protective layer so as to form a second absorption layer including a plurality of pore parts through which a fluid flows to the first absorption layer. - View Dependent Claims (21, 22, 23)
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Specification