SHOWERHEAD INTEGRATING INTAKE AND EXHAUST

• US 20120145078A1
• Filed: 08/17/2011
• Published: 06/14/2012
• Est. Priority Date: 12/10/2010
• Status: Abandoned Application

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Wang, Ching-Chiun, Tsai, Chen-Der, Hsu, Wen-Tung, Tung, Fu-Ching, Sun, Chien-Jen, Huang, Chih-Yung, Chen, Chien-Chih, Pan, Yi-Tsung
• Application Number:
  US13/211,309
• Publication Number:
  US 20120145078A1
• Time in Patent Office: Days
• US Class Current: 118/715
• CPC Class Codes: C23C 16/4412 Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
• CPC Class Codes: C23C 16/45565 Shower nozzles

Abstract

A showerhead integrating intake and exhaust is provided for showering a gas. The showerhead at least includes a showerhead body that has a gas-active surface and a plurality of intake bores thereon. The showerhead body further includes a central exhaust vent disposed on the gas-active surface. The central exhaust vent may exhaust standing gas and further pre-exhaust byproduct from reaction process.

Claims

1. A showerhead integrating intake and exhaust, for showering a gas, comprising at least one showerhead body, and the showerhead body has a gas-active surface and a plurality of intake bores disposed on the gas-active surface, wherein

the showerhead body further comprises a central exhaust vent disposed on a center of the gas-active surface.

2. The showerhead integrating intake and exhaust as claimed in claim 1, wherein a ratio of an area of the central exhaust vent to an area of the intake bores ranges from 0.03 to 0.04.

3. The showerhead integrating intake and exhaust as claimed in claim 1, wherein the central exhaust vent is constituted by a plurality of exhaust bores.

4. The showerhead integrating intake and exhaust as claimed in claim 1, wherein an extraction end of the central exhaust vent concaves inward to the showerhead body.

5. The showerhead integrating intake and exhaust as claimed in claim 1, wherein an exhaust direction of the central exhaust vent and an intake direction of the plurality of intake bores are parallel.

6. The showerhead integrating intake and exhaust as claimed in claim 1, wherein a ratio of an area of the central exhaust vent to an area of the intake bores is smaller than 0.03.

7. The showerhead integrating intake and exhaust as claimed in claim 6, the showerhead body further comprises at least one annular exhaust vent disposed concentrically with the central exhaust vent as a center.

8. The showerhead integrating intake and exhaust as claimed in claim 7, wherein the annular exhaust vent is constituted by a plurality of exhaust bores.

9. The showerhead integrating intake and exhaust as claimed in claim 7, wherein an extraction end of the annular exhaust vent concaves inward to the showerhead body.

10. The showerhead integrating intake and exhaust as claimed in claim 7, wherein an exhaust direction of the annular exhaust vent and an intake direction of the plurality of intake bores are parallel.

11. The showerhead integrating intake and exhaust as claimed in claim 7, further comprising at least one flow meter to control an exhaust amount of the central exhaust vent or the annular exhaust vent.

12. The showerhead integrating intake and exhaust as claimed in claim 7, wherein the showerhead is for showering the gas on a plurality of substrates.

13. The showerhead integrating intake and exhaust as claimed in claim 12, wherein a position of the annular exhaust vent and an arrangement of the substrates are staggered.

14. The showerhead integrating intake and exhaust as claimed in claim 12, further comprising a lift mechanism to adjust a distance between the substrates and the showerhead body.

15. The showerhead integrating intake and exhaust as claimed in claim 12, wherein an area of the showerhead body is larger than a total area of the substrates.

16. The showerhead integrating intake and exhaust as claimed in claim 1, further comprising at least one flow meter to control an exhaust amount of the central exhaust vent.

17. The showerhead integrating intake and exhaust as claimed in claim 1, wherein the showerhead is for showering the gas on a plurality of substrates.

18. The showerhead integrating intake and exhaust as claimed in claim 17, wherein the central exhaust vent and an arrangement of the substrates are staggered.

19. The showerhead integrating intake and exhaust as claimed in claim 17, further comprising a lift mechanism to adjust a distance between the substrates and the showerhead body.

20. The showerhead integrating intake and exhaust as claimed in claim 17, wherein an area of the showerhead body is larger than a total area of the substrates.