THIN FILM TRANSISTOR ARRAY PANEL
First Claim
1. A thin film transistor array panel, comprising:
- a substrate;
a gate line disposed on the substrate and comprising a gate electrode;
a first gate insulating layer disposed on the gate line and comprising silicon nitride;
a second gate insulating layer disposed on the first gate insulating layer and comprising silicon oxide;
an oxide semiconductor disposed on the second gate insulating layer;
a data line disposed on the oxide semiconductor and comprising a source electrode;
a drain electrode disposed on the oxide semiconductor and facing the source electrode; and
a pixel electrode that is connected to the drain electrode,wherein a thickness of the second gate insulating layer is greater than or equal to 200 Å and
less than 500 Å
.
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Accused Products
Abstract
A thin film transistor array panel includes an insulating substrate, a gate line disposed on the insulating substrate having a gate electrode, a first gate insulating layer disposed on the gate line and made of silicon nitride, a second gate insulating layer disposed on the first gate insulating layer and made of silicon oxide, an oxide semiconductor disposed on the second gate insulating layer, a data line disposed on the oxide semiconductor and having a source electrode, a drain electrode disposed on the oxide semiconductor and facing the source electrode, and a pixel electrode that is connected to the drain electrode. A thickness of the second gate insulating layer may range from 200 Å to less than 500 Å.
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Citations
12 Claims
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1. A thin film transistor array panel, comprising:
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a substrate; a gate line disposed on the substrate and comprising a gate electrode; a first gate insulating layer disposed on the gate line and comprising silicon nitride; a second gate insulating layer disposed on the first gate insulating layer and comprising silicon oxide; an oxide semiconductor disposed on the second gate insulating layer; a data line disposed on the oxide semiconductor and comprising a source electrode; a drain electrode disposed on the oxide semiconductor and facing the source electrode; and a pixel electrode that is connected to the drain electrode, wherein a thickness of the second gate insulating layer is greater than or equal to 200 Å and
less than 500 Å
. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification