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MICROELECTROMECHANICAL SYSTEM DEVICE AND SEMI-MANUFACTURE AND MANUFACTURING METHOD THEREOF

  • US 20120146452A1
  • Filed: 11/15/2011
  • Published: 06/14/2012
  • Est. Priority Date: 12/10/2010
  • Status: Abandoned Application
First Claim
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1. A semi-manufacture of a MEMS device, comprising:

  • a substrate;

    a MEMS disposed on the substrate and comprising;

    a movable element; and

    a functional element coupled with the movable element for sensing a physical quantity of movement of the movable element and outputting a corresponding sensed signal, or controlling the movable element to generate the desired physical quantity of movement; and

    a conductive circuit disposed on the substrate and electrically connected with the movable element and the functional element so that the movable element and the functional element are equi-potential.

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