MICROELECTROMECHANICAL SYSTEM DEVICE AND SEMI-MANUFACTURE AND MANUFACTURING METHOD THEREOF
First Claim
Patent Images
1. A semi-manufacture of a MEMS device, comprising:
- a substrate;
a MEMS disposed on the substrate and comprising;
a movable element; and
a functional element coupled with the movable element for sensing a physical quantity of movement of the movable element and outputting a corresponding sensed signal, or controlling the movable element to generate the desired physical quantity of movement; and
a conductive circuit disposed on the substrate and electrically connected with the movable element and the functional element so that the movable element and the functional element are equi-potential.
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Accused Products
Abstract
A manufacturing method of the MEMS device disposes a conductive circuit to maintain various elements of the MEMS equi-potential thereby preventing electrostatic damages to various elements of the MEMS during the manufacturing process.
21 Citations
20 Claims
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1. A semi-manufacture of a MEMS device, comprising:
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a substrate; a MEMS disposed on the substrate and comprising; a movable element; and a functional element coupled with the movable element for sensing a physical quantity of movement of the movable element and outputting a corresponding sensed signal, or controlling the movable element to generate the desired physical quantity of movement; and a conductive circuit disposed on the substrate and electrically connected with the movable element and the functional element so that the movable element and the functional element are equi-potential. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A manufacturing method of the MEMS device, comprising:
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providing a substrate; disposing a MEMS and a conductive circuit on the substrate, wherein the MEMS comprises a movable element and a functional element, wherein the functional element is coupled with the movable element for sensing a physical quantity of movement of the movable element and outputting a corresponding sensed signal, or controlling the movable element to generate the desired physical quantity of movement;
the conductive circuit is electrically connected with the movable element and the functional element so that the movable element and the functional element are equi-potential; anddisconnecting the conductive circuit. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A MEMS device, comprising:
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a substrate; a movable element disposed on the substrate; and a functional element disposed on the substrate, coupled with the movable element for sensing a physical quantity of movement of the movable element and outputting a corresponding sensed signal, or controlling the movable element to generate the desired physical quantity of movement; and a conductive circuit disposed on the substrate, comprising a switch circuit and electrically connected with the movable element and the functional element so that when the switch circuit is conductive or cutoff the movable element and the functional element are equi-potential or electrically isolated. - View Dependent Claims (19, 20)
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Specification