Yaw-rate sensor and method for operating a yaw-rate sensor

• US 20120152019A1
• Filed: 11/28/2011
• Published: 06/21/2012
• Est. Priority Date: 11/29/2010
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Kuhlmann, Burkhard, Scheben, Rolf, Meisel, Daniel Christoph, Schmidt, Benjamin, Balslink, Thorsten
• Granted Patent: US 8,783,105 B2
• Time in Patent Office: Days
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure

Abstract

A yaw-rate sensor is described as having a substrate which has a main plane of extension for detecting a yaw rate about a first axis extending parallel to the main plane of extension is provided, the yaw-rate sensor having a first rotation element and a second rotation element, the first rotation element being drivable about a first axis of rotation, the second rotation element being drivable about a second axis of rotation, the first axis of rotation being situated perpendicularly to the main plane of extension, the second axis of rotation being situated perpendicularly to the main plane of extension, the first rotation element and the second rotation element being drivable in opposite directions.

Claims

1. A yaw-rate sensor, comprising:

a substrate, which has a main plane of extension for detecting a yaw rate about a first axis extending parallel to the main plane of extension;

a first rotation element;

a second rotation element, wherein the first rotation element is drivable about a first axis of rotation, wherein the second rotation element is drivable about a second axis of rotation, wherein the first axis of rotation is situated perpendicular to the main plane of extension, wherein the second axis of rotation is situated perpendicular to the main plane of extension, and wherein the first rotation element and the second rotation element is drivable in opposite directions.

2. The yaw-rate sensor of claim 1, wherein the first rotation element and the second rotation element are connected to each other via at least one coupling element.

3. The yaw-rate sensor of claim 2, wherein the coupling element is connected to the substrate via at least one spring.

4. The yaw-rate sensor of claim 3, wherein the coupling element has a rocker structure having a rocker axis of rotation, the rocker axis of rotation running parallel to the first axis.

5. The yaw-rate sensor of claim 1, wherein the first rotation element is configured as an outer ring, wherein the second rotation element is configured as an inner ring, wherein the first rotation element is situated inside the second rotation element, and wherein the first axis of rotation runs through the second axis of rotation.

6. The yaw-rate sensor of claim 1, wherein at least one first mass element and one second mass element are situated between the first rotation element and the second rotation element, wherein the first mass element is connected to the first rotation element and the second mass element is connected to the second rotation element, and wherein the first mass element is coupled to the second mass element.

7. The yaw-rate sensor of claim 1, wherein the first rotation element has a plate-shaped configuration, and wherein the second rotation element has a plate-shaped configuration.

8. The yaw-rate sensor of claim 1, wherein the yaw-rate sensor has a third rotation element having a third axis of rotation and a fourth rotation element having a fourth axis of rotation, the third axis of rotation and the fourth axis of rotation being situated perpendicular to the main plane of extension, the third rotation element and the first rotation element being drivable in opposite directions, the third rotation element and the fourth rotation element being drivable in opposite directions.

9. The yaw-rate sensor of claim 1, wherein the first rotation element is coupled to the second rotation element, and the third rotation element is coupled to the fourth rotation element.

10. A method for operating a yaw-rate sensor, the method comprising:

driving a first rotation element about a first axis of rotation of the yaw-rate sensor, which has a substrate which has a main plane of extension for detecting a yaw rate about a first axis extending parallel to the main plane of extension, wherein the first rotation element and a second rotation element are situated; and

driving the second rotation element about a second axis of rotation, the first axis of rotation being situated perpendicularly to the main plane of extension, the second axis of rotation being situated perpendicularly to the main plane of extension, the first rotation element and the second rotation element being driven in opposite directions.

11. The method of claim 10, wherein the rotation elements are tilted parallel to a to the second axis, a first and a second detection signal being generated by the deflection of the first rotation element, a third and a fourth detection signal being generated by the deflection of the second rotation element, the first through fourth detection signals being evaluated individually, a fifth and a sixth detection signal being generated by the deflection of the third rotation element, a seventh and an eighth detection signal being generated by the deflection of the fourth rotation element, the first through eighth detection signals being evaluated individually.

12. The method of claim 10, wherein the first and the third detection signals and/or the first, the third, the fifth, and the seventh detection signals are added to form a first sum signal, the second and the fourth and/or the second, the fourth, the sixth, and the eighth detection signals being added to form a second sum signal, a difference signal being formed from the first sum signal and the second sum signal, the yaw rate being determined as a function of the difference signal, a grid electrode being furthermore situated.