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Alkali Metal Deposition System

  • US 20120152727A1
  • Filed: 11/21/2011
  • Published: 06/21/2012
  • Est. Priority Date: 11/24/2010
  • Status: Abandoned Application
First Claim
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1. A deposition system for alkali and alkaline earth metals comprising:

  • a vacuum chamber;

    a metal sputter target within said vacuum chamber, said target comprising target material attached to a backing plate including cooling channels;

    a substrate holder within said vacuum chamber, said holder being configured to hold a substrate facing and parallel to said metal sputter target; and

    multiple power sources configured to apply energy to a plasma ignited between said substrate and said target material, said multiple power sources including a first power source for controlling target material self bias, and a second power source for controlling ion density in said plasma;

    wherein said target material is an alkali metal or alkaline earth metal.

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