SEMICONDUCTOR COMPONENT WITH A SPACE SAVING EDGE STRUCTURE
First Claim
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1. Semiconductor component comprising:
- a semiconductor body comprising a first side and a second side, and a first semiconductor layer having a basic doping of a first conductivity type;
at least one active component zone of a second conductivity type, which is complementary to the first conductivity type, in the first semiconductor layer;
a cell array with a plurality of trenches, each trench including a field electrode and a field electrode dielectric;
at least one cell array edge zone of the second conductivity type, the cell array edge zone in the cell array only arranged in an edge region of the cell array, adjoining at least one trench of the cell array, and being at least partially arranged below the at least one trench in the cell array.
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Abstract
A semiconductor component is disclosed. One embodiment includes a semiconductor body including a first semiconductor layer having at least one active component zone, a cell array with a plurality of trenches, and at least one cell array edge zone. The cell array edge zone is only arranged in an edge region of the cell array, adjoining at least one trench of the cell array, and being at least partially arranged below the at least one trench in the cell array.
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27 Claims
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1. Semiconductor component comprising:
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a semiconductor body comprising a first side and a second side, and a first semiconductor layer having a basic doping of a first conductivity type; at least one active component zone of a second conductivity type, which is complementary to the first conductivity type, in the first semiconductor layer; a cell array with a plurality of trenches, each trench including a field electrode and a field electrode dielectric; at least one cell array edge zone of the second conductivity type, the cell array edge zone in the cell array only arranged in an edge region of the cell array, adjoining at least one trench of the cell array, and being at least partially arranged below the at least one trench in the cell array. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification