INTERFEROMETER WITH PARABOLOIDAL ILLUMINATION AND IMAGING OPTIC AND TILTED IMAGING PLANE

• US 20120154819A1
• Filed: 12/06/2011
• Published: 06/21/2012
• Est. Priority Date: 12/17/2010
• Status: Active Grant

• Current Assignee: Corning Incorporated
• Original Assignee: Corning Incorporated
• Inventors: Cobb, Joshua Monroe, Dunn, Thomas James, Frankovich, John Weston
• Granted Patent: US 8,526,008 B2
• Time in Patent Office: Days
• US Class Current: 356/513
• CPC Class Codes: G01B 11/2441 using interferometry
• CPC Class Codes: G01B 9/02004 using frequency scans
• CPC Class Codes: G01B 9/02057 by using common path configuration, i.e. reference and object path almost entirely overlapping
• CPC Class Codes: G01B 9/02059 Reducing effect of parasitic reflections, e.g. cyclic errors

Abstract

A Fizeau interferometer incorporates an off-axis paraboloidal reflector that forms virtual images of reference and test surfaces and a camera lens that converts the virtual images into real images on a camera detector surface. The camera detector surface is arranged together with the camera lens to accommodate tilting of the virtual images by the off-axis paraboloidal reflector.

Claims

1. A Fizeau interferometer for measuring a test surface of an object comprising:

an off-axis paraboloidal reflector having a paraboloidal axis and a paraboloidal reflective surface that is offset from the paraboloidal axis;

an effective light source located with respect to the off-axis paraboloidal reflector so that coherent light emanating from the light source along a main optical axis to the off-axis paraboloidal reflector is collimated by reflection from the offset paraboloidal reflective surface;

a Fizeau reference surface oriented for receiving the collimated light at normal incidence, reflecting a first portion of the light, and transmitting a second portion of the light to and from the test surface;

the off-axis paraboloidal reflector being arranged for forming overlapping virtual images of the of the reference and test surfaces, the overlapping virtual images being tilted through a non-normal angle to the main optical axis; and

a camera detector surface together with a camera lens for converting the virtual images of the reference and test surfaces into real images on the camera detector surface having an optical orientation matching an optical orientation through which the virtual images are tilted.

2. The interferometer of claim 1 in which the camera lens has an optical axis, and the camera detector surface is tilted at a non-normal angle to the optical axis of the camera lens for matching the non-normal angle through which the virtual images are tilted.

3. The interferometer of claim 1 in which the camera lens includes a corrective optic for matching the optical orientation of the camera detector surface to the optical orientation through which the virtual images are tilted.

4. The interferometer of claim 3 in which the corrective optic is an optical wedge.

5. The interferometer of claim 1 in which magnification of corresponding points on the reference and test surfaces as imaged onto the camera detector surface varies with offset of the corresponding points from the paraboloidal axis and further comprising a processor for mapping image points on the camera detector surface to intended locations of the corresponding points on the reference and test surfaces.

6. The interferometer of claim 1 in which a centerline through the offset paraboloidal reflector and the Fizeau reference surface is offset beyond the main optical axis extending between the offset paraboloidal reflector and the Fizeau reference surface for centering the real images of the reference and test surfaces on the camera detector surface.

7. The interferometer of claim 1 in which the off-axis paraboloidal reflector reflects the light from the reference and test surfaces through a telecentric stop that is conjugate to the effective light source.

8. The interferometer of claim 1 in which off-axis paraboloidal reflector has a focal surface shaped as a section of a paraboloid, and the Fizeau reference surface intersects the focal surface of the off-axis paraboloidal reflector so that a portion of the reference surface is located on one side of the focal surface and another portion of the reference surface is located on an opposite side of the focal surface.

9. The interferometer of claim 1 including a beam-splitting plate for separating light propagating from the effective light source to the off-axis paraboloidal reflector from light propagating from the off-axis paraboloidal reflector to the camera lens.

10. The interferometer of claim 9 in which the beam-splitting plate has a normal that is inclined to the main optical axis and a wedge angle between front and back surfaces that compensates for aberrations produced by propagation of the coherent light through the inclined beam-splitting plate.

11. The interferometer of claim 1 in which the effective light source is arrange for emitting a succession of different frequency light beams, the camera lens is arranged for capturing a succession of different interference patterns, and a processor provides for calculating rates of change in phase for a plurality of image points on the camera detector surface as measures of differences between the Fizeau reference surface and the test surface.

12. A method of measuring a test surface of an object with a Fizeau interferometer comprising:

emitting coherent light from an effective light source;

propagating the coherent light toward an off-axis paraboloidal reflector along a main optical axis;

reflecting the coherent light from the off-axis paraboloidal reflector toward a Fizeau reference surface as a collimated beam;

reflecting a portion of the collimated beam from the Fizeau reference surface and transmitting another portion of the collimated beam to and from the test surface;

collecting the light portions from the reference and test surfaces with the off-axis paraboloidal reflector and reflecting the collected light portions from the off-axis paraboloidal reflector for forming overlapping virtual images of the reference and test surfaces in an optical orientation that is tilted through a non-normal angle with respect to the main optical axis;

converting the virtual images of the reference and test surfaces into real images on a camera detector surface having an optical orientation matching the optical orientation through which the virtual images are tilted; and

monitoring an interference pattern formed by the real images of the reference and test surfaces for measuring differences between the reference and test surfaces.

13. The method of claim 12 in which the step of emitting includes emitting the coherent light through a focal point of the off-axis paraboloidal reflector for collimating the coherent light reflected from the off-axis paraboloidal reflector.

14. The method of claim 12 in which the step of converting the virtual images of the reference and test surfaces includes tilting the camera detector surface at a non-normal angle to an optical axis of the camera lens for matching the non-normal angle through which the virtual images are tilted.

15. The method of claim 12 in which the step of converting the virtual images of the reference and test surfaces includes using a corrective optic for matching the optical orientation of the camera detector surface to the optical orientation through which the virtual images are tilted.

16. The method of claim 12 including a step of offsetting a centerline of the off-axis paraboloidal reflector and the Fizeau reference surface from the main optical axis extending between the off-axis paraboloidal reflector and the Fizeau reference surface.

17. The method of claim 12 including a step of locating the Fizeau reference surface in a position for intersecting a focal surface of the off-axis paraboloidal reflector such that a portion of the reference surface is located on one side of the focal surface and another portion of the reference surface is located on an opposite side of the focal surface.

18. The method of claim 12 in which magnification of points within an object field of the test surface varies with offset of the object points from the paraboloidal axis and including a step of mapping image points on the camera detector surface to intended locations on the test surface.

19. The method of claim 12 including step of separating light propagating from the effective light source to the off-axis paraboloidal reflector from light propagating from the off-axis paraboloidal reflector to the camera lens with a beam-splitting plate having a normal that is inclined to the main optical axis and a wedge angle between front and back surfaces that compensates for aberrations produced by propagation of the coherent light through the inclined beam-splitting plate.

20. The method of claim 12 in which the step of emitting includes emitting a succession of different frequency light beams, the step of monitoring includes monitoring a succession of different interference patterns, and including a step of calculating rates of change in phase for a plurality of image points within the camera detector surface as measures of differences between the Fizeau reference surface and the test surface.