MANUFACTURING-PROCESS EQUIPMENT

• US 20120156320A1
• Filed: 12/17/2010
• Published: 06/21/2012
• Est. Priority Date: 12/17/2010
• Status: Active Grant

• Current Assignee: National Formosa University
• Original Assignee: National Formosa University
• Inventors: Jywe, Wen-Yuh, Liu, Chien-Hung, Duan, Lili, Huang, Chun-Chieh, Shen, Jing-Chung, Yang, Chin-Tien, Wu, Chia-Hung, Lee, Yuan-Chin, Ju, Jau-Jiu
• Granted Patent: US 8,575,791 B2
• Time in Patent Office: Days
• US Class Current: 425/150
• CPC Class Codes: B23K 26/0853 Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane

Abstract

A manufacturing-process equipment has a platform assembly, a measurement feedback assembly and a laser-working assembly. The platform assembly has a base and a hybrid-moving platform. The base has a mounting frame. The hybrid-moving platform is mounted on the base and has a long-stroke moving stage and a piezo-driven micro-stage. The long-stroke moving stage has a benchmark set and a driving device. The piezo-driven micro-stage is connected to the long-stroke moving stage and has a working platform. The measurement feedback assembly is securely mounted on the platform assembly and has a laser interferometer, a reflecting device and a signal-receiving device. The laser-working assembly is mounted on the platform assembly, is electrically connected to the measurement feedback assembly and has a laser direct-writing head, a controlling interface device and a positioning interface device.

Claims

1. A manufacturing-process equipment comprising:

a platform assembly having

a base having

a top; and

a mounting frame mounted on the top of the base and having

a top; and

a bottom; and

a hybrid-moving platform mounted on the top of the base below the mounting frame and having

a long-stroke moving stage mounted on the top of the base below the mounting frame and having

a benchmark set being H-shaped and mounted securely on the top of the base; and

a driving device mounted on the benchmark set and having multiple linear motors mounted on the benchmark set; and

a piezo-driven micro-stage connected to the long-stroke moving stage and having a working platform with a top face;

a measurement feedback assembly securely mounted on the platform assembly and having

a laser interferometer securely mounted on the top of the base to emit a laser beam;

a reflecting device mounted on the top face of the working frame; and

a signal-receiving device securely mounted on the top of the base receive the laser beam that reflected by the receiving device; and

a laser-working assembly mounted on the platform assembly, electrically connected to the measurement feedback assembly and having

a laser direct-writing head securely mounted on the mounting frame of the base above the working platform;

a controlling interface device securely mounted on the bottom of the mounting frame, electrically connected to the laser direct-writing head to control the working power and the auto-focusing control of the laser direct-writing head; and

a positioning interface device mounted on the top of the mounting frame above the controlling interface device, electrically connected to the measurement feedback assembly and the laser direct-writing head to receive the moving signals of the platform assembly that detected by the measurement feedback assembly to compare the desired position of the laser direct-writing head and the movement signal that detected by the measurement feedback assembly.

2. The manufacturing-process equipment as claimed in claim 1, wherein each linear motor has

an upper side;

a lower side;

multiple stators securely mounted on the sides of the linear motor at intervals to form a magnetic leading rail;

an active cell movably mounted in the magnetic leading rail of the linear motor between the stators that mounted on the sides of the linear motor and having an outer end extended out of the linear motor; and

a connecting board connected to the outer end of the active cell and having a connecting side opposite to the active cell.

3. The manufacturing-process equipment as claimed in claim 2, wherein

the piezo-driven micro-stage has

a loading frame connected to the connecting boards of the driving device and having a top;

a micro-adjustable device mounted on the top of the loading frame and having

a flexible seat mounted on the top of the loading frame and having a periphery; and

multiple piezoelectric actuators securely mounted on the top of the loading frame and abutting the periphery of the flexible seat; and

multiple crossing-roller bearing devices securely mounted on the top of the loading frame beside the micro-adjustable device and each crossing-roller bearing device having a top end; and

the working platform is securely mounted on the flexible seat and the top ends of the crossing-roller bearing devices above the lading frame.

4. The manufacturing-process equipment as claimed in claim 3, wherein the laser interferometer has

a first beam splitter securely mounted on the top of the base and mounted on an emitting path of the laser beam;

a second beam splitter securely mounted on the top of the base near the first beam splitter and mounted on the emitting path of the laser beam;

a 90-degree reflecting mirror securely mounted on the top of the base and aligning with the beam splitters to change an emitting direction of the laser beam at a right angle;

a first interfere mirror mounted on the top of the base to receive the laser beam that splitted by the first beam splitter;

a second interfere mirror mounted on the top of the base to receive the laser beam that splitted by the second beam splitter; and

a third interfere mirror mounted on the top of the base to receive the laser beam that reflected by the 90-degree reflecting mirror.

5. The manufacturing-process equipment as claimed in claim 4, wherein the reflecting device has

a first reflecting mirror securely mounted on the top face of the working frame to reflect the laser beam that emitted by the first interfere mirror and the second interfere mirror;

and

a second reflecting mirror securely mounted on the top face of the working frame at a right angle with the first reflecting mirror to reflect the laser beam that emitted by the third interfere mirror.

6. The manufacturing-process equipment as claimed in claim 5, wherein the signal-receiving device has

a first receiver securely mounted on the top of the base to receive the laser beam that reflected by the first reflecting mirror from the first interfere mirror;

a second receiver securely mounted on the top of the base to receive the laser beam that reflected by the first reflecting mirror from the second interfere mirror; and

a third receiver securely mounted on the top of the base to receive the laser beam that reflected by the second reflecting mirror from the third interfere mirror.

7. The manufacturing-process equipment as claimed in claim 1, wherein the laser interferometer has

a first beam splitter securely mounted on the top of the base and mounted on an emitting path of the laser beam;

a second beam splitter securely mounted on the top of the base near the first beam splitter and mounted on the emitting path of the laser beam;

a 90-degree reflecting mirror securely mounted on the top of the base and aligning with the beam splitters, to change an emitting direction of the laser beam at a right angle;

a first interfere mirror mounted on the top of the base to receive the laser beam that splitted by the first beam splitter;

a second interfere mirror mounted on the top of the base to receive the laser beam that splitted by the second beam splitter; and

a third interfere mirror mounted on the top of the base to receive the laser beam that refracted by the 90-degree reflecting mirror.

8. The manufacturing-process equipment as claimed in claim 7, wherein the reflecting device has

a first reflecting mirror securely mounted on the top face of the working frame to reflect the laser beam that emitted by the first interfere mirror and the second interfere mirror;

and

a second reflecting mirror securely mounted on the top face of the working frame at a right angle with the first reflecting mirror to reflect the laser beam that emitted by the third interfere mirror.

9. The manufacturing-process equipment as claimed in claim 8, wherein the signal-receiving device has

a first receiver securely mounted on the top of the base to receive the laser beam that reflected by the first reflecting mirror from the first interfere mirror;

a second receiver securely mounted on the top of the base to receive the laser beam that reflected by the first reflecting mirror from the second interfere mirror; and

a third receiver securely mounted on the top of the base to receive the laser beam that reflected by the second reflecting mirror from the third interfere mirror.