SECONDARY-ELECTRON DETECTOR AND CHARGED PARTICLE BEAM APPARATUS
First Claim
1. A secondary electron detector comprising:
- a scintillator for absorbing electrons and emits light;
a photo-multiplier for amplifying the light emitted from the scintillator;
an electrode member for accelerating the electrons toward the scintillator; and
an insulating member, the insulating member is brought into contact with the electrode member and the photomultiplier to provide insulation therebetween;
the scintillator is disposed on the incidence side end of the photomultiplier;
the electrode member covers the circumference of the scintillator; and
the insulating member is disposed between the electrode member and the photomultiplier.
2 Assignments
0 Petitions
Accused Products
Abstract
A scintillator 21 is disposed on an incidence side 23a of a photomultiplier 23. A scintillator cap 22 for introducing electrons into the scintillator 21 is disposed around the scintillator 21. The photomultiplier 23 is disposed in a sample chamber 17 with a vacuum seal formed around the photomultiplier 23. An insulating member 25 made of an opaque material is disposed between the scintillator cap 22 and the photomultiplier 23. The insulating member 25 provides insulation between the scintillator cap 22 and the photomultiplier 23. The lateral circumference of the photomultiplier 23 is covered to prevent light from entering the photomultiplier 23. A band filter 27 for blocking the illumination light of an optical microscope 30 is disposed between the scintillator 21 and the incidence side 23a of the photomultiplier 23 to make it possible to conduct simultaneous observations by using the electrons and the optical microscope.
17 Citations
10 Claims
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1. A secondary electron detector comprising:
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a scintillator for absorbing electrons and emits light; a photo-multiplier for amplifying the light emitted from the scintillator; an electrode member for accelerating the electrons toward the scintillator; and an insulating member, the insulating member is brought into contact with the electrode member and the photomultiplier to provide insulation therebetween; the scintillator is disposed on the incidence side end of the photomultiplier; the electrode member covers the circumference of the scintillator; and the insulating member is disposed between the electrode member and the photomultiplier. - View Dependent Claims (2, 3, 4)
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5. A charged particle beam apparatus comprising:
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electron beam irradiation means for irradiating a sample with an electron beam; a scintillator that absorbs electrons and emits light; a photo-multiplier that amplifies the light emitted from the scintillator; an electrode member that accelerates the electrons toward the scintillator; and an insulating member, the insulating member is brought into contact with the electrode member and the photomultiplier to provide insulation therebetween; the scintillator is disposed on the incidence side end of the photomultiplier; the electrode member covers the circumference of the scintillator; and the insulating member is disposed between the electrode member and the photomultiplier. - View Dependent Claims (6, 7, 8, 9, 10)
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Specification
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- Resources
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Current AssigneeHoriba Limited
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Original AssigneeHoriba Limited
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InventorsTATENO, Hiroshi
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Granted Patent
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Time in Patent OfficeDays
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Field of Search
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US Class Current250/310
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CPC Class CodesH01J 2237/2443 Scintillation detectorsH01J 2237/2448 Secondary particle detectorsH01J 37/244 Detectors; Associated compo...H01J 37/28 with scanning beams H01J37/...
