Semiconductor Device
First Claim
1. A semiconductor device comprising:
- a semiconductor layer of a first conductivity type;
a semiconductor layer of a second conductivity type different from the first conductivity type formed on the semiconductor layer of the first conductivity type, wherein the semiconductor layer of the second conductivity type is characterized by a first thickness;
a trench having a predetermined depth and extending into the semiconductor layer of the second conductivity type, thereby defining an interfacial region disposed between the semiconductor layer of the second conductivity type and the trench, wherein the trench comprises;
a distal portion consisting essentially of a dielectric material disposed therein; and
a proximal portion comprising the dielectric material and a gate material disposed interior to the dielectric material in the proximal portion of the trench;
a second trench having the predetermined depth and extending into the semiconductor layer of the second conductivity type, thereby defining a second interfacial region disposed between the semiconductor layer of the second conductivity type and the second trench, wherein the second trench comprises;
a distal portion consisting essentially of the dielectric material disposed therein; and
a proximal portion comprising the dielectric material and the gate material disposed interior to the dielectric material in the proximal portion of the second trench; and
a source region coupled to the semiconductor layer of the second conductivity type.
1 Assignment
0 Petitions
Accused Products
Abstract
A semiconductor device includes a semiconductor layer of a first conductivity type and a semiconductor layer of a second conductivity type formed thereon. The semiconductor layer of the second conductivity type is characterized by a first thickness. The semiconductor device includes a set of trenches having a predetermined depth and extending into the semiconductor layer of the second conductivity type, thereby defining interfacial regions disposed between the semiconductor layer of the second conductivity type and each of the trenches. The trenches comprises a distal portion consisting essentially of a dielectric material disposed therein and a proximal portion comprising the dielectric material and a gate material disposed interior to the dielectric material in the proximal portion of the trench. The semiconductor device further includes a source region coupled to the semiconductor layer of the second conductivity type.
19 Citations
15 Claims
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1. A semiconductor device comprising:
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a semiconductor layer of a first conductivity type; a semiconductor layer of a second conductivity type different from the first conductivity type formed on the semiconductor layer of the first conductivity type, wherein the semiconductor layer of the second conductivity type is characterized by a first thickness; a trench having a predetermined depth and extending into the semiconductor layer of the second conductivity type, thereby defining an interfacial region disposed between the semiconductor layer of the second conductivity type and the trench, wherein the trench comprises; a distal portion consisting essentially of a dielectric material disposed therein; and a proximal portion comprising the dielectric material and a gate material disposed interior to the dielectric material in the proximal portion of the trench; a second trench having the predetermined depth and extending into the semiconductor layer of the second conductivity type, thereby defining a second interfacial region disposed between the semiconductor layer of the second conductivity type and the second trench, wherein the second trench comprises; a distal portion consisting essentially of the dielectric material disposed therein; and a proximal portion comprising the dielectric material and the gate material disposed interior to the dielectric material in the proximal portion of the second trench; and a source region coupled to the semiconductor layer of the second conductivity type. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15-34. -34. (canceled)
Specification