CYCLIC CARBOSILANE DIELECTRIC FILMS
First Claim
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1. A device comprising,a substrate,a dielectric film disposed on the substrate, wherein the dielectric film is comprised of crosslinked cyclic carbosilanes wherein a cyclic carbosilane has a ring structure comprising carbon and silicon, and wherein the dielectric film is hydrophobic.
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Abstract
Embodiments of the invention provide dielectric films and low-k dielectric films and methods for making dielectric and low-k dielectric films. Dielectric films are made from carbosilane-containing precursors. In embodiments of the invention, dielectric film precursors comprise attached porogen molecules. In further embodiments, dielectric films have nanometer-dimensioned pores.
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22 Claims
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1. A device comprising,
a substrate, a dielectric film disposed on the substrate, wherein the dielectric film is comprised of crosslinked cyclic carbosilanes wherein a cyclic carbosilane has a ring structure comprising carbon and silicon, and wherein the dielectric film is hydrophobic.
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10. A device comprising,
a substrate, a dielectric film disposed on the substrate, wherein the dielectric film is comprised of crosslinked cyclic carbosilanes wherein a cyclic carbosilane has a ring structure comprising carbon and silicon, and wherein the dielectric film is porous and the porosity is in the range of 25% to 60%.
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17. A method for making a dielectric film comprising,
providing a substrate having a surface, depositing a mixture comprising oligomers of cyclic carbosilanes, wherein a cyclic carbosilane has a ring structure comprising carbon and silicon, and a polymerization initiator wherein the polymerization initiator is selected from the group consisting of photo acid generators, photo base generators, thermally-activated acid generators, and thermally-activated base generators, onto the substrate surface, and exposing the substrate to light or heat causing the photo acid generator, photo base generator, thermally-activated acid generator, or thermally-activated base generator to be activated producing and acid or a base and causing the mixture to solidify.
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