APPARATUS AND METHOD FOR NEAR FIELD SCAN CALIBRATION

• US 20120161803A1
• Filed: 12/13/2011
• Published: 06/28/2012
• Est. Priority Date: 12/22/2010
• Status: Active Grant

• Current Assignee: Electronics and Telecommunications Research Institute
• Original Assignee: Electronics and Telecommunications Research Institute
• Inventors: Wee, Jae Kyung, YEO, SOON IL, Lee, Pil Soo
• Granted Patent: US 8,786,298 B2
• Time in Patent Office: Days
• US Class Current: 324/750.02
• CPC Class Codes: G01R 29/0814 Field measurements related to measuring influence on or from apparatus, components or humans EMC, EMI and similar testing in general G01R31/001, e.g. in ESD, EMI, EMC, EMP testing, measuring radiation leakage; detecting presence of micro- or radiowave emitters; dosimetry; testing shielding; measurements related to lightning
• CPC Class Codes: G01R 29/0892 Details related to signal analysis or treatment; presenting results, e.g. displays; measuring specific signal features other than field strength, e.g. polarisation, field modes, phase, envelope, maximum value
• CPC Class Codes: G01R 35/00 Testing or calibrating of apparatus covered by the other groups of this subclass

Abstract

Disclosed are a method and an apparatus of near field scan calibration, and more particularly, a method and an apparatus for near field scan calibration for calibrating a characteristic of an antenna for near field scan measurement of a semiconductor chip. The apparatus for near field scan calibration includes: a plane-type text fixture having a plane shape; an antenna positioned spaced apart from the plane-type test fixture by a set spacing distance and acquiring data including a magnetic field; and a spectrum analyzer analyzing the data acquired by the antenna.

Claims

1. An apparatus for near field scan calibration, comprising:

a plane-type text fixture having a plane shape;

an antenna spaced apart from the plane-type test fixture by a set spacing distance and acquiring data including a magnetic field; and

a spectrum analyzer analyzing the data acquired by the antenna.

2. The apparatus of claim 1, wherein the plane-type test fixture has a circular shape.

3. The apparatus of claim 1, wherein the plane-type test fixture has a polygonal shape including a triangular shape or a quadrangular shape.

4. The apparatus of claim 1, wherein the spacing distance between the plane-type test fixture and the antenna is 1 mm.

5. The apparatus of claim 4, wherein the antenna is set as a first port and the plane-type test fixture is set as a second port.

6. The apparatus of claim 5, wherein the data acquired by the antenna includes the intensity of a spatial magnetic field generated vertically to the surface of the plane-type test fixture including a transmission coefficient and a reflection coefficient.

7. The apparatus of claim 6, wherein the magnetic field is acquired by analyzing conducted emission (CE) transferred to a conductor.

8. The apparatus of claim 1, wherein the plane-type test fixture is made of metal.

9. A method for near field scan calibration, comprising:

feeding power to a center of a plane-type test fixture;

acquiring data including a magnetic field from an antenna for near field scan measurement spaced apart from the plane-type test fixture by a set spacing distance; and

extracting a characteristic of the antenna by using the data.

10. The method of claim 9, wherein the plane-type test fixture has a circular shape.

11. The method of claim 9, wherein the plane-type test fixture has a polygonal shape including a triangular shape or a quadrangular shape.

12. The method of claim 9, wherein in the feeding of the power to the center of the plane-type test fixture, a plurality of plane-type test fixtures are provided for each size and the power is fed to each plane-type test fixture.

13. The method of claim 9, wherein the spacing distance between the plane-type test fixture and the antenna is 1 mm.

14. The method of claim 13, wherein the antenna is set as a first port and the plane-type test fixture is set as a second port.

15. The method of claim 14, wherein in the acquiring of the data, the intensity of a spatial magnetic field generated vertically to the surface of the plane-type test fixture including a transmission coefficient and a reflection coefficient is acquired.

16. The method of claim 15, wherein the magnetic field is acquired by analyzing conducted emission (CE) transferred to a conductor.