APPARATUS AND METHOD FOR NEAR FIELD SCAN CALIBRATION
First Claim
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1. An apparatus for near field scan calibration, comprising:
- a plane-type text fixture having a plane shape;
an antenna spaced apart from the plane-type test fixture by a set spacing distance and acquiring data including a magnetic field; and
a spectrum analyzer analyzing the data acquired by the antenna.
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Abstract
Disclosed are a method and an apparatus of near field scan calibration, and more particularly, a method and an apparatus for near field scan calibration for calibrating a characteristic of an antenna for near field scan measurement of a semiconductor chip. The apparatus for near field scan calibration includes: a plane-type text fixture having a plane shape; an antenna positioned spaced apart from the plane-type test fixture by a set spacing distance and acquiring data including a magnetic field; and a spectrum analyzer analyzing the data acquired by the antenna.
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Citations
16 Claims
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1. An apparatus for near field scan calibration, comprising:
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a plane-type text fixture having a plane shape; an antenna spaced apart from the plane-type test fixture by a set spacing distance and acquiring data including a magnetic field; and a spectrum analyzer analyzing the data acquired by the antenna. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for near field scan calibration, comprising:
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feeding power to a center of a plane-type test fixture; acquiring data including a magnetic field from an antenna for near field scan measurement spaced apart from the plane-type test fixture by a set spacing distance; and extracting a characteristic of the antenna by using the data. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification