MIRROR DEVICE, MIRROR ARRAY, OPTICAL SWITCH, MIRROR DEVICE MANUFACTURING METHOD, AND MIRROR SUBSTRATE MANUFACTURING METHOD
First Claim
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1. A mirror device comprising:
- a mirror which is supported to be pivotable with respect to a mirror substrate;
a driving electrode which is formed on an electrode substrate facing said mirror substrate.wherein said driving electrode is formed at an arbitrary position on said electrode substrate asymmetrically with respect to a pivot axis of said mirror projected onto said electrode substrate.
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Abstract
A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.
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Citations
6 Claims
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1. A mirror device comprising:
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a mirror which is supported to be pivotable with respect to a mirror substrate; a driving electrode which is formed on an electrode substrate facing said mirror substrate. wherein said driving electrode is formed at an arbitrary position on said electrode substrate asymmetrically with respect to a pivot axis of said mirror projected onto said electrode substrate. - View Dependent Claims (2, 3, 4)
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5. A mirror array characterized by two-dimensionally arraying a plurality of mirror devices, each of the mirror devices comprising:
- a mirror which is supported to be pivotable with respect to a mirror substrate;
a driving electrode which is formed on an electrode substrate facing said mirror substrate, wherein said driving electrode is formed at an arbitrary position on said electrode substrate asymmetrically with respect to a pivot axis of said mirror projected onto said electrode substrate, and the arbitrary position is decided in accordance with a position of the mirror device in the mirror array.
- a mirror which is supported to be pivotable with respect to a mirror substrate;
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6. An optical witch comprising:
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a first mirror array which reflects light from an input port; and a second mirror array which reflects the light from said first mirror array and guides the light to an output port, each of said first mirror array and said second mirror array comprising a mirror array formed by two-dimensionally arraying a plurality of mirror devices, each of the mirror devices comprising a mirror which is supported to be pivotable with respect to a mirror substrate, a driving electrode which is formed cm an electrode substrate facing said mirror substrate, wherein said driving electrode is formed at an arbitrary position on said electrode substrate asymmetrically with respect to a pivot axis of said mirror projected onto said electrode substrate, and the arbitrary position is decided in accordance with a position of the mirror device in the mirror array.
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Specification