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SILICON PEN NANOLITHOGRAPHY

  • US 20120167262A1
  • Filed: 06/04/2010
  • Published: 06/28/2012
  • Est. Priority Date: 06/05/2009
  • Status: Active Grant
First Claim
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1. A tip array comprising a plurality of tips fixed to an elastomeric backing layer, the tips comprising a metal, a metalloid (optionally silicon), a semi-conducting material, or a combination thereof, and each tip having a radius of curvature of less than 1 μ

  • m.

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