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PRESSURE SENSOR WITH PRESSURE-ACTUATED SWITCH

  • US 20120167659A1
  • Filed: 01/05/2011
  • Published: 07/05/2012
  • Est. Priority Date: 01/05/2011
  • Status: Active Grant
First Claim
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1. A pressure sensor comprising:

  • a substrate including a first metallic contact;

    a membrane attached to the substrate, the membrane including a second metallic contact and responding to pressure by deflection;

    a cavity wherein the first and second metallic contacts are located;

    a contact area between the first and second metallic contacts that enables contact between the first and second contacts when the membrane deflects at a defined pressure; and

    a signal path that allows a current flow when the first metallic contact makes contact with the second metallic contact.

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