MEMS device and deformation protection structure therefor and method for making same
First Claim
1. A MEMS device on a substrate, the MEMS device comprising:
- a movable part; and
a deformation protection structure including;
a fixed plug fixed on the substrate;
multiple metal layers including a top metal layer and a bottom metal layer, wherein the bottom metal layer is connected with the fixed plug; and
multiple plugs connecting the multiple metal layers;
wherein from top view, the top metal layer overlaps a portion of the movable part, and from cross section view, the bottom surface of the top metal layer is higher than the top surface of the movable part by a predetermined distance.
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Abstract
The present invention discloses a MEMS (Micro-Electro-Mechanical System, MEMS) device with a deformation protection structure. The MEMS device is located on a substrate, and it includes: a movable part; and a deformation protection structure, which has: a fixed plug, which is fixed on the substrate; multiple metal layers, including a top metal layer; and multiple plugs connecting the multiple metal layers. From top view, the top metal layer overlaps a portion of the movable part, and from cross section view, the bottom surface of the top metal layer is higher than the top surface of the movable part by a predetermined distance.
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Citations
11 Claims
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1. A MEMS device on a substrate, the MEMS device comprising:
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a movable part; and a deformation protection structure including; a fixed plug fixed on the substrate; multiple metal layers including a top metal layer and a bottom metal layer, wherein the bottom metal layer is connected with the fixed plug; and multiple plugs connecting the multiple metal layers; wherein from top view, the top metal layer overlaps a portion of the movable part, and from cross section view, the bottom surface of the top metal layer is higher than the top surface of the movable part by a predetermined distance. - View Dependent Claims (2, 3, 4, 5)
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6. A deformation protection structure located on a substrate for a MEMS device having a movable part, the deformation protection structure comprising:
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a fixed plug fixed on the substrate; multiple metal layers including a top metal layer and a bottom metal layer, wherein the bottom metal layer is connected with the fixed plug; and multiple plugs connecting the multiple metal layers; wherein from top view, the top metal layer overlaps a portion of the movable part, and from cross section view, the bottom surface of the top metal layer is higher than the top surface of the movable part by a predetermined distance. - View Dependent Claims (7, 8)
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9. A method for manufacturing a MEMS device, comprising:
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providing a substrate; forming a fixed plug fixed on the substrate; forming multiple metal layers and multiple plugs connecting the multiple metal layers, and defining patterns of the multiple metal layers and the multiple plugs to form a movable part and a fixed structure which are separated from each other, wherein the fixed structure is connected with the fixed plug; and forming a metal plug and a top metal layer on the fixed structure, wherein from top view, the top metal layer overlaps a portion of the movable part, and from cross section view, the bottom surface of the top metal layer is higher than the top surface of the movable part by a predetermined distance. - View Dependent Claims (10, 11)
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Specification