DISPLAY APPARATUS USING OXIDE SEMICONDUCTOR AND PRODUCTION THEREOF
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Abstract
A transistor includes a source terminal and a drain terminal, an active layer including an oxide containing In, a gate electrode, and a gate insulating layer between the gate electrode and the active layer. At least a part of the active layer is amorphous, and an electric current flowing between the source terminal and the drain terminal of the transistor is less than 10 μA when the transistor is in an off state. In addition, the gate insulating layer contains hydrogen in an amount of less than 3×1021 atoms/cm3.
6 Citations
26 Claims
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1-9. -9. (canceled)
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10. A transistor comprising:
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a source terminal and a drain terminal; an active layer comprising an oxide containing In; a gate electrode; and a gate insulating layer between the gate electrode and the active layer, wherein at least a part of the active layer is amorphous, wherein an electric current flowing between the source terminal and the drain terminal of the transistor is less than 10 μ
A when the transistor is in an off state, andwherein the gate insulating layer contains hydrogen in an amount of less than 3×
1021 atoms/cm3. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A display apparatus comprising:
a plurality pixels, with each pixel comprising; a display element; a transistor for driving the display element, with the transistor comprising; a source terminal and a drain terminal; an active layer comprising an oxide containing In; a source electrode and a drain electrode electrically connected to the active layer; and a gate electrode overlapped with a channel portion of the active layer; and a first insulating layer in contact with the active layer, wherein at least a part of the active layer is amorphous, wherein an electric current flowing between the source terminal and the drain terminal of the transistor is less than 10 μ
A when the transistor is in an off state, andwherein the first insulating layer contains hydrogen in an amount of less than 3×
1021 atoms/cm3.- View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26)
Specification