DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF

• US 20120170784A1
• Filed: 03/15/2012
• Published: 07/05/2012
• Est. Priority Date: 10/14/2005
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Kimura, Hajime
• Granted Patent: US 8,576,347 B2
• Time in Patent Office: Days
• US Class Current: 381/333
• CPC Class Codes: G02F 1/133345 Insulating layers G02F1/1335, G02F1/1337, G02F1/135, G02F1/136 take precedence
• CPC Class Codes: G02F 1/133512 Light shielding layers, e.g. black matrix G02F1/136209 takes precedence
• CPC Class Codes: G02F 1/133707 Structures for producing distorted electric fields, e.g. bumps, protrusions, recesses, slits in pixel electrodes
• CPC Class Codes: G02F 1/134309 characterised by their geometrical arrangement
• CPC Class Codes: G02F 1/134336 Matrix
• CPC Class Codes: G02F 1/13439 characterised by their electrical, optical, physical properties; materials therefor; method of making
• CPC Class Codes: G02F 1/136209 Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
• CPC Class Codes: G02F 1/136218 Shield electrodes
• CPC Class Codes: G02F 1/136227 Through-hole connection of the pixel electrode to the active element through an insulation layer
• CPC Class Codes: G02F 1/136286 Wiring, e.g. gate line, drain line
• CPC Class Codes: G02F 1/13629 Multilayer wirings
• CPC Class Codes: G02F 1/1368 in which the switching element is a three-electrode device G02F1/136277 takes precedence
• CPC Class Codes: G02F 2201/122 having a particular pattern
• CPC Class Codes: G02F 2201/123 pixel
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1288 employing particular masking sequences or specially adapted masks, e.g. half-tone mask
• CPC Class Codes: H01L 29/458 for thin film silicon, e.g. source or drain electrode
• CPC Class Codes: H10K 2102/103 comprising indium oxides, e.g. ITO
• CPC Class Codes: H10K 50/814 combined with auxiliary electrodes, e.g. ITO layer combined with metal lines
• CPC Class Codes: H10K 50/816 Multilayers, e.g. transparent multilayers
• CPC Class Codes: H10K 59/1201 : Manufacture or treatment
• CPC Class Codes: H10K 59/123 : Connection of the pixel electrodes to the thin film transistors [TFT]
• CPC Class Codes: H10K 59/131 : Interconnections, e.g. wiring lines or terminals
• CPC Class Codes: H10K 59/1315 : comprising structures specially adapted for lowering the resistance
• CPC Class Codes: H10K 71/00 : Manufacture or treatment specially adapted for the organic devices covered by this subclass

Abstract

It is an object of the present invention to form a pixel electrode and a metal film using one resist mask in manufacturing a stacked structure by forming the metal film over the pixel electrode. A conductive film to be a pixel electrode and a metal film are stacked. A resist pattern having a thick region and a region thinner than the thick region is formed over the metal film using an exposure mask having a semi light-transmitting portion. The pixel electrode, and the metal film formed over part of the pixel electrode to be in contact therewith are formed using the resist pattern. Accordingly, a pixel electrode and a metal film can be formed using one resist mask.

Claims

1. A display device comprising:

a gate electrode over a substrate;

a gate insulating film over the gate electrode;

an island-like semiconductor film over the gate insulating film;

a conductive layer over the island-like semiconductor film, the conductive layer being electrically connected to the island-like semiconductor film;

a transparent conductive film over the gate insulating film; and

a metal film over and in contact with the transparent conductive film, the metal film being electrically connected to the conductive layer,

wherein the transparent conductive film is a pixel electrode of a fringe field switching mode liquid crystal display device.

2. The display device according to claim 1, wherein part of the transparent conductive film is interposed between the metal film and the conductive layer.

3. The display device according to claim 1, wherein the transparent conductive film is in contact with a side surface of the island-like semiconductor film.

4. The display device according to claim 1, wherein an outer edge of the metal film is inside an outer edge of the transparent conductive film.

5. An electronic device comprising:

the display device according to claim 1;

a speaker;

a microphone; and

a switch.

6. A display device comprising:

a gate electrode over a substrate;

a gate insulating film over the gate electrode;

an island-like semiconductor film over the gate insulating film;

a conductive layer over the island-like semiconductor film, the conductive layer being electrically connected to the island-like semiconductor film;

a transparent conductive film over the gate insulating film; and

a metal film over and in contact with the transparent conductive film, the metal film being electrically connected to the conductive layer,

wherein the transparent conductive film comprises a portion whose thickness is smaller than a thickness of a portion which is in contact with the metal film.

7. The display device according to claim 6,

wherein the transparent conductive film is a pixel electrode of a fringe field switching mode liquid crystal display device.

8. The display device according to claim 6, wherein part of the transparent conductive film is interposed between the metal film and the conductive layer.

9. The display device according to claim 6, wherein the transparent conductive film is in contact with a side surface of the island-like semiconductor film.

10. The display device according to claim 6, wherein an outer edge of the metal film is inside an outer edge of the transparent conductive film.

11. An electronic device comprising:

the display device according to claim 6;

a speaker;

a microphone; and

a switch.

12. A display device comprising:

a gate electrode over a substrate;

a gate insulating film over the gate electrode;

an island-like semiconductor film over the gate insulating film;

a conductive layer over the island-like semiconductor film, the conductive layer being electrically connected to the island-like semiconductor film;

a transparent conductive film over the gate insulating film; and

a metal film over and in contact with the transparent conductive film, the metal film being electrically connected to the conductive layer,

wherein the transparent conductive film and the metal film each have a different taper angle.

13. The display device according to claim 12, wherein the transparent conductive film is a pixel electrode of a fringe field switching mode liquid crystal display device.

14. The display device according to claim 12, wherein part of the transparent conductive film is interposed between the metal film and the conductive layer.

15. The display device according to claim 12, wherein the transparent conductive film is in contact with a side surface of the island-like semiconductor film.

16. The display device according to claim 12, wherein an outer edge of the metal film is inside an outer edge of the transparent conductive film.

17. An electronic device comprising:

the display device according to claim 12;

a speaker;

a microphone; and

a switch.