Implementation of Transmission and Control Platform for Equipment Front End Module of Semiconductor Production System
First Claim
1. A method of platformization of an equipment front end module of a semiconductor production system, comprising the steps of:
- (a) establishing a subsystem management module communicating linked to a plurality of subsystem modules, a communication interface module, a parse module, and a network communication module in responsive to characteristics of a plurality of equipment front end modules of a semiconductor production system from different manufacturers;
(b) directing a command by said communication interface module to said subsystem management module when said communication interface module receives said command sent from a control system of said semiconductor production system;
(c) analyzing said command by said subsystem management module and sending said command to said corresponding subsystem module, wherein based on the currently state, said command is sent from said corresponding subsystem module to a controller of said equipment front end module through said network communication module; and
(d) analyzing message, which is sent from said controller of said equipment front end module through said network communication module, by said parse module, sending a feedback to said corresponding subsystem module, and then sending said feedback to said control system of said semiconductor production system through said communication interface module.
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Abstract
A method of platformization of an equipment front end module of a semiconductor production system includes the steps of: establishing a subsystem management module, a communication interface module, a parse module, and a network communication module; directing the command by the communication interface module to the subsystem management module; analyzing the command by the subsystem management module and sending the command to the corresponding subsystem module; sending the command from the corresponding subsystem module to the controller of the equipment front end module through the network communication module; and analyzing message by the parse module, sending a feedback to the corresponding subsystem module, and then sending the feedback to the control system of the semiconductor production system through the communication interface module. The present invention provides a standardized software interface to standardize different IC equipment control systems and to enhance the production efficiency of the system.
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Citations
10 Claims
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1. A method of platformization of an equipment front end module of a semiconductor production system, comprising the steps of:
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(a) establishing a subsystem management module communicating linked to a plurality of subsystem modules, a communication interface module, a parse module, and a network communication module in responsive to characteristics of a plurality of equipment front end modules of a semiconductor production system from different manufacturers; (b) directing a command by said communication interface module to said subsystem management module when said communication interface module receives said command sent from a control system of said semiconductor production system; (c) analyzing said command by said subsystem management module and sending said command to said corresponding subsystem module, wherein based on the currently state, said command is sent from said corresponding subsystem module to a controller of said equipment front end module through said network communication module; and (d) analyzing message, which is sent from said controller of said equipment front end module through said network communication module, by said parse module, sending a feedback to said corresponding subsystem module, and then sending said feedback to said control system of said semiconductor production system through said communication interface module. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification