MICROMACHINED RESONANT MAGNETIC FIELD SENSORS

• US 20120176128A1
• Filed: 01/11/2011
• Published: 07/12/2012
• Est. Priority Date: 01/11/2011
• Status: Active Grant

• Current Assignee: Invensense Incorporated (TDK Corporation)
• Original Assignee: Invensense Incorporated (TDK Corporation)
• Inventors: SEEGER, Joseph, LO, Chiung C., CAGDASER, Baris, SHAEFFER, Derek
• Granted Patent: US 8,860,409 B2
• Time in Patent Office: Days
• US Class Current: 324/244
• CPC Class Codes: G01R 33/0286 comprising microelectromechanical systems [MEMS] MEMS devices in general B81B
• CPC Class Codes: G01R 33/038 using permanent magnets, e.g. balances, torsion devices

Abstract

A micromachined magnetic field sensor comprising is disclosed. The micromachined magnetic field comprises a substrate; a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate; a mechanism for providing an electrical current through the drive subsystem along a first axis; and Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field along a third axis. The micromachined magnetic field sensor also includes a sense subsystem, the sense subsystem comprises a plurality of beams, and at least one anchor connected to the substrate; wherein a portion of the sense subsystem moves along a fourth axis; a coupling spring between the drive subsystem and the sense subsystem which causes motion of the sense subsystem in response to the magnetic field; and a position transducer to detect the motion of the sense subsystem.

Claims

1. A micromachined magnetic field sensor comprising:

a substrate;

a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate;

a mechanism for providing an electrical current through the drive subsystem along a first axis; and

Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field along a third axis;

a sense subsystem, the sense subsystem comprises a plurality of beams, and at least one anchor connected to the substrate;

wherein a portion of the sense subsystem moves along a fourth axis;

a coupling spring between the drive subsystem and the sense subsystem which causes motion of the sense subsystem in response to the magnetic field; and

a position transducer to detect the motion of the sense subsystem.

2. The micromachined magnetic field sensor of claim 1, wherein the coupling spring comprises structural coupling springs.

3. The micromachined magnetic field sensor of claim 1, wherein the coupling spring comprises electrostatic coupling springs.

4. The micromachined magnetic field sensor of claim 1, wherein the third axis of the magnetic field is along a Z-axis which is normal to the plane of the substrate;

the motion of the sense subsystem is along the fourth axis which is in a X-Y plane; and

the electrostatic coupling spring causes motion of sense subsystem in the X-Y plane in response to magnetic field in the Z-axis.

5. The micromachined magnetic field sensor of claim 1, wherein the third axis of the magnetic field is in a X-Y plane which is parallel to the plane of the substrate;

the motion of the sense subsystem is along the fourth axis which is in a Z-axis; and

the electrostatic coupling springs causes motion of sense subsystem in the Z-axis in response to the magnetic field in X-Y plane.

6. The micromachined magnetic field sensor of claim 1, wherein the electrostatic coupling springs is utilized with any parallel plate capacitive transducers, or interdigitated comb capacitive transducers

7. The micromachined magnetic field sensor of claim 1, wherein the drive subsystem, the sense subsystem and the coupling spring form a mechanical system with at least two resonant modes, at least one drive subsystem anti-resonance and a least one sense subsystem anti-resonance.

8. The micromachined magnetic field sensor of claim 7, wherein the frequency of the electrical current along the first axis substantially matches the drive subsystem anti-resonance frequency;

and the frequency of the electrical current along the first axis substantially matches the sense subsystem anti-resonance frequency.

9. The micromachined magnetic field sensor of claim 1, wherein the position transducer comprises any of parallel plate capacitive transducers, interdigitated comb capacitive transducers, piezoresistive sensors, optical sensors, and piezoelectric sensors.

10. A micromachined resonant magnetic field sensor comprising:

a substrate;

a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate;

a mechanism for providing an electrical current through the drive subsystem along a first axis; and

Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field along a third axis; and

a position transducer to detect the motion of the drive subsystem; and

a self-test actuator causes force acting on the drive subsystem along the second axis.

11. The micromachined resonant magnetic field sensor of claim 10, wherein the self-test actuator comprises electrostatic actuators.

12. The micromachined resonant magnetic field sensor of claim 10, wherein the self-test actuator comprises current-carrying coils to generate a magnetic field along the third axis which interacts with drive subsystem resulting in Lorentz force along the second axis acting on the drive subsystem.

13. A micromachined resonant magnetic field sensor comprising:

a substrate;

a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate;

a mechanism for providing an electrical current through the drive subsystem along a first axis; and

Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field along a third axis a position transducer to detect the motion of the drive subsystem;

a stiffness tuning block to change the stiffness of the drive subsystem in order to compensate manufacturing variation.

14. The micromachined resonant magnetic field sensor of claim 13, wherein the stiffness tuning block is utilized with mechanisms comprising electrostatic transducers, electro-thermal actuators, and piezoelectric actuators.

15. A multi-axis magnetic field sensor system comprising:

at least one micromachined magnetic field sensor comprising;

a substrate;

a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate;

a mechanism for providing an electrical current through the drive subsystem along a first axis; and

Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field along a third axis;

a sense subsystem, the sense subsystem comprises a plurality of beams, and at least one anchor connected to the substrate;

wherein a portion of the sense subsystem moves along a fourth axis, a coupling spring between the drive subsystem and the sense subsystem which causes motion of the sense subsystem in response to the magnetic field; and

a position transducer to detect the motion of the sense subsystem; and

at least one magnetic field sensor that responds to a magnetic field perpendicular to the third axis.

16. The multi-axis magnetic field sensor of claim 15 wherein the at least one magnetic field sensor comprises any of or any combination of Hall sensors, magnetoresistive sensors, magneto-diode sensors, magneto-transistors, fluxgates, magneto-impedance sensors, magneto-optical sensors, and MAGFETs.

17. The multi-axis magnetic field sensor of claim 15 is further integrated with motion sensors including any of linear acceleration sensor, gyroscopes, pressure sensors, and acoustic sensors.

18. A multi-axis magnetic field sensor system comprising:

a substrate wherein a Z axis is normal to the plane of the substrate and an X-Y plane is parallel to the plane of the substrate.

a Z-axis micromachined magnetic field sensor, wherein the Z axis micromachined magnetic field sensor comprises a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate;

a mechanism for providing an electrical current through the drive subsystem in the X-Y plane; and

Lorentz force acting on the drive subsystem in the X-Y plane in response to a magnetic field along the Z axis;

a sense subsystem, the sense subsystem comprises a plurality of beams, and at least one anchor connected to the substrate;

wherein a portion of the sense subsystem moves in the X-Y plane;

a coupling spring between the drive subsystem and the sense subsystem which causes motion of the sense subsystem in response to the magnetic field; and

a position transducer to detect the motion of the sense subsystem;

a X-axis micromachined magnetic field sensor, wherein the X-axis micromachined magnetic field sensor comprises a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate;

a mechanism for providing an electrical current through the drive subsystem in the X-Y plane; and

Lorentz force acting on the drive subsystem along the Z-axis in response to a magnetic field along the X-axis;

a sense subsystem, the sense subsystem comprises a plurality of beams, and at least one anchor connected to the substrate;

wherein a portion of the sense subsystem moves along the Z-axis;

a coupling spring between the drive subsystem and the sense subsystem which causes motion of the sense subsystem in response to the magnetic field; and

a position transducer to detect the motion of the sense subsystem; and

a Y-axis micromachined magnetic field sensor, wherein the Y-axis micromachined magnetic field sensor comprises a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate;

a mechanism for providing an electrical current through the drive subsystem in the X-Y plane; and

Lorentz force acting on the drive subsystem along the Z-axis in response to a magnetic field along the Y axis;

a sense subsystem comprising a plurality of beams, and at least one anchor connected to the substrate;

wherein a portion of the sense subsystem moves along the Z-axis;

a coupling spring between the drive subsystem and the sense subsystem which causes motion of the sense subsystem in response to the magnetic field; and

a position transducer to detect the motion of the sense subsystem.

19. A micromachined magnetic field sensor comprising:

a substrate;

a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate;

a mechanism for providing an electrical current through the drive subsystem along a first axis; and

Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field along a third axis;

a sense subsystem, the sense subsystem comprises a plurality of beams, and at least one anchor connected to the substrate;

wherein a portion of the sense subsystem moves along a fourth axis;

a coupling spring between the drive subsystem and the sense subsystem which causes motion of sense subsystem in response to the magnetic field;

a position transducer to detect the motion of the sense subsystem; and

a self-test actuator causes force acting on the drive subsystem along the second axis.

20. A micromachined magnetic field sensor comprising:

a substrate;

a drive subsystem, the drive subsystem comprises a plurality of beams, at least one anchor connected to the substrate;

a mechanism for providing an electrical current through the drive subsystem along a first axis; and

Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field along a third axis;

a sense subsystem, the sense subsystem comprises a plurality of beams, and at least one anchor connected to the substrate;

wherein a portion of the sense subsystem moves along a fourth axis;

a coupling spring between the drive subsystem and the sense subsystem which causes motion of sense subsystem in response to the magnetic field;

a position transducer to detect the motion of the sense subsystem; and

a stiffness tuning block to change the stiffness of the sense subsystem in order to compensate manufacturing variation.