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MICROMACHINED RESONANT MAGNETIC FIELD SENSORS

  • US 20120176128A1
  • Filed: 01/11/2011
  • Published: 07/12/2012
  • Est. Priority Date: 01/11/2011
  • Status: Active Grant
First Claim
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1. A micromachined magnetic field sensor comprising:

  • a substrate;

    a drive subsystem, the drive subsystem comprises a plurality of beams, and at least one anchor connected to the substrate;

    a mechanism for providing an electrical current through the drive subsystem along a first axis; and

    Lorentz force acting on the drive subsystem along a second axis in response to a magnetic field along a third axis;

    a sense subsystem, the sense subsystem comprises a plurality of beams, and at least one anchor connected to the substrate;

    wherein a portion of the sense subsystem moves along a fourth axis;

    a coupling spring between the drive subsystem and the sense subsystem which causes motion of the sense subsystem in response to the magnetic field; and

    a position transducer to detect the motion of the sense subsystem.

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