GENERATING CUT MASK FOR DOUBLE-PATTERNING PROCESS
First Claim
1. A computer-implemented method of designing a photomask, the method comprising:
- simulating a first photomask patterning process using a first photomask design to create simulated contours;
comparing the simulated contours to a desired design;
identifying regions not common to the simulated contours and the desired design;
creating desired target shapes for a second photomask patterning process subsequent to the first photomask patterning process based upon the identified regions; and
providing the desired target shapes for forming of a second photomask design based upon the desired target shapes.
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Accused Products
Abstract
Aspects of the invention include a computer-implemented method of designing a photomask. In one embodiment, the method comprises: simulating a first photomask patterning process using a first photomask design to create simulated contours; comparing the simulated contours to a desired design; identifying regions not common to the simulated contours and the desired design; creating desired target shapes for a second photomask patterning process subsequent to the first photomask patterning process based upon the identified regions; and providing the desired target shapes for forming of a second photomask design based upon the desired target shapes.
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Citations
25 Claims
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1. A computer-implemented method of designing a photomask, the method comprising:
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simulating a first photomask patterning process using a first photomask design to create simulated contours; comparing the simulated contours to a desired design; identifying regions not common to the simulated contours and the desired design; creating desired target shapes for a second photomask patterning process subsequent to the first photomask patterning process based upon the identified regions; and providing the desired target shapes for forming of a second photomask design based upon the desired target shapes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A computer system comprising:
at least one computing device configured to design a photomask by performing actions comprising; simulating a first photomask patterning process using a first photomask design to create simulated contours; comparing the simulated contours to a desired design; identifying regions not common to the simulated contours and the desired design; creating desired target shapes for a second photomask patterning process subsequent to the first photomask patterning process based upon the identified regions; and providing the desired target shapes for forming of a second photomask design based upon the desired target shapes. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. A computer program comprising program code embodied in at least one computer-readable storage medium, which when executed, enables a computer system to implement a method for designing a photomask, the method comprising:
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simulating a first photomask patterning process using a first photomask design to create simulated contours; comparing the simulated contours to a desired design; identifying regions not common to the simulated contours and the desired design; creating desired target shapes for a second photomask patterning process subsequent to the first photomask patterning process based upon the identified regions; and providing the desired target shapes for forming of a second photomask design based upon the desired target shapes. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24)
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25. A computer system comprising:
at least one computing device configured to design a photomask by performing actions comprising; simulating a first photomask patterning process using a first photomask design to create simulated contours, the first photomask design having target shapes including at least one of design features and additional features; comparing the simulated contours to a desired design; identifying regions not common to the simulated contours and the desired design; creating desired target shapes for a second photomask patterning process subsequent to the first photomask patterning process based upon the identified regions, wherein the desired target shapes for the second photomask patterning process are created to remove at least one of extraneous features and additional features in the identified region during the second photomask patterning process, wherein the extraneous features include features predicted to print due to at least one of optical interference and sub-resolution assist features (SRAFs); and providing the desired target shapes for forming of a second photomask design based upon the desired target shapes.
Specification