NANOFLUIDIC CELL
First Claim
1. A flow cell comprising:
- a body structure comprising an internal channel, an inlet port and an outlet port, wherein said inlet port and said outlet port are in flow communication with said internal channel;
said body structure further comprising a membrane enclosing a portion of said internal channel and defining a detection zone within said internal channel, wherein a thickness of said membrane is selected to allow the transmission of a probe beam within a selected energy range through said membrane and into said internal channel; and
wherein transverse dimensions of said internal channel outside of said detection zone are selected to provide a fluidic resistance outside of said detection zone that is less than a fluidic resistance within said detection zone.
1 Assignment
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Accused Products
Abstract
A flow cell is provided for the analysis and/or microscopy of liquid or gas samples on the nanometer to micron scale. The flow cell preferably includes a thin membrane that is transparent to electrons and/or photons, thereby enabling the penetration of electrons or photons into a liquid flowing through the cell. Trenches are provided on either side of the membrane, which advantageously minimize fluidic resistance outside of the window area of the cell and also enable a faster response time in response to changes in external fluidic pressure. This feature enables active feedback using pathlength sensitive probes to stabilize the fluid flow to thin streams from nanometer to micron scale thicknesses with nanometer precision.
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Citations
50 Claims
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1. A flow cell comprising:
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a body structure comprising an internal channel, an inlet port and an outlet port, wherein said inlet port and said outlet port are in flow communication with said internal channel; said body structure further comprising a membrane enclosing a portion of said internal channel and defining a detection zone within said internal channel, wherein a thickness of said membrane is selected to allow the transmission of a probe beam within a selected energy range through said membrane and into said internal channel; and wherein transverse dimensions of said internal channel outside of said detection zone are selected to provide a fluidic resistance outside of said detection zone that is less than a fluidic resistance within said detection zone. - View Dependent Claims (2, 4, 7, 9, 11, 12, 15, 17, 23, 26, 28, 29)
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6. The flow cell according to 1 wherein an area of said membrane is less than approximately 1 mm2.
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31. A method of analyzing a fluid sample with a flow cell, said flow cell comprising:
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a body structure comprising an internal channel, an inlet port and an outlet port, wherein said inlet port and said outlet port are in flow communication with said internal channel; said body structure further comprising a membrane enclosing a portion of said internal channel and defining a detection zone within said internal channel, wherein a thickness of said membrane is selected to allow the transmission of a probe beam within a selected energy range through said membrane and into said internal channel; and wherein transverse dimensions of said internal channel outside of said detection zone are selected to provide a fluidic resistance outside of said detection zone that is less than a fluidic resistance within said detection zone; the method comprising the steps of; flowing said sample to said inlet port and through said internal channel; directing said probe beam onto said membrane; and detecting one of a reflected probe beam and a transmitted probe beam. - View Dependent Claims (36)
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43. A method for fabricating a flow cell, comprising the steps of:
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a) providing an upper substrate; b) depositing a transparent layer onto a bottom surface of said upper substrate, wherein said transparent layer is transparent to a probe beam within a selected energy range; c) forming an aperture within said upper substrate, said aperture extending through said upper substrate, by removing a portion of said upper substrate and exposing a membrane comprising a portion of said transparent layer; d) providing a lower substrate; e) depositing a spacer layer onto one of said transparent layer of said upper substrate and an upper surface of said lower substrate, and removing a portion of said spacer layer to define a channel; e) forming an inlet port and an outlet port in one of said upper substrate and said lower substrate; f) forming first and second trenches provided on adjacent sides of said membrane within one of said upper substrate and said lower substrate; and g) aligning and adhering said upper substrate and said lower substrate; wherein said membrane defines a detection zone within said channel; and wherein said channel is in flow communication with said membrane, said trenches, said inlet port and said outlet port for flowing a sample through said detection zone within said flow cell, and wherein said trenches comprise transverse dimensions selected to provide a fluidic resistance outside of said detection zone that is less than a fluidic resistance within said detection zone. - View Dependent Claims (44, 45, 46)
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47. (canceled)
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50. (canceled)
Specification