Shape measuring apparatus

• US 20120194651A1
• Filed: 09/28/2011
• Published: 08/02/2012
• Est. Priority Date: 01/31/2011
• Status: Abandoned Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Endo, Takeshi, Kanto, Kenta, Yamashita, Seiho
• Application Number:
  US13/200,652
• Publication Number:
  US 20120194651A1
• Time in Patent Office: Days
• US Class Current: 348/50
• CPC Class Codes: G01B 11/00 Measuring arrangements characterised by the use of optical techniques
• CPC Class Codes: G01B 11/24 for measuring contours or curvatures
• CPC Class Codes: G06T 7/571 from focus

Abstract

[PROBLEMS] To provide a shape measuring apparatus having a configuration which enables the operation for aligning a measuring probe and a candidate object to be simplified when the shape of the candidate object is measured.

[MEANS TO SOLVE THE PROBLEMS] A shape measuring apparatus is configured so that an optical probe 20 moves relative to a candidate object, and the three-dimensional shape of the candidate object is measured without contact from information obtained by the optical probe 20. The shape measuring apparatus includes a gantry structure 10 allowing the optical probe 20 to be moved to a predetermined position relative to the candidate object, and a support device 30 allowing the candidate object to be rotated around at least two rotational axes.

Claims

1. A shape measuring apparatus configured so that a measuring probe is caused to move in a relative manner with respect to a candidate object, and a three-dimensional shape of the candidate object is measured in a non-contact manner from information obtained by the measuring probe,

the shape measuring apparatus comprising:

a movement device for moving the measuring probe to a desired position with respect to the candidate object, and

a support device for rotating the candidate object around at least two rotational axes.

2. The shape measuring apparatus according to claim 1, the support device having a stage portion on which the candidate object is mounted, wherein causing the stage portion to rotate around a first rotational axis extending perpendicular to the mounting plane enables the candidate object to be rotated within a horizontal plane, and causing the stage portion to rotate through the first rotational axis and around a second rotational axis perpendicular to the first rotational axis enables the candidate object to be tilted relative to the horizontal plane.

3. The shape measuring apparatus according to claim 1, wherein the movement device has a drive mechanism for translating the measuring probe along three mutually perpendicular axes.

4. The shape measuring apparatus according to claim 3, wherein the movement device comprises:

a base for holding the support device,

a pillar able to move along an in-plane direction of a holding surface on the base,

a frame extending in a direction perpendicular to a direction in which the pillar is able to move and extending in a direction parallel to the in-plane direction, and

a carriage for holding the measuring probe movably in a direction perpendicular to the moving direction and the extending direction, the carriage being able to move in the extending direction of the frame,

the pillar, carriage, and measuring probe being driven by the drive mechanism.

5. The shape measuring apparatus according to claim 1, wherein the measuring probe comprises a camera and an image processor for processing a signal outputted from the camera, the camera having an image optics system for taking an image of the candidate object.

6. The shape measuring apparatus according to claim 1, wherein the measuring probe comprises an light sectioning probe having a slit light illumination unit for irradiating the candidate object with a slit light in the form of a sheet, and a camera for imaging the candidate object illuminated by the slit light, the camera being arranged with an optical axis offset by a predetermined angle relative to the direction of irradiation of the slit light.

12. The shape measuring apparatus according to claim 2, wherein the movement device has a drive mechanism for translating the measuring probe along three mutually perpendicular axes.

13. The shape measuring apparatus according to claim 2, wherein the measuring probe comprises a camera and an image processor for processing a signal outputted from the camera, the camera having an image optics system for taking an image of the candidate object.

14. The shape measuring apparatus according to claim 3, wherein the measuring probe comprises a camera and an image processor for processing a signal outputted from the camera, the camera having an image optics system for taking an image of the candidate object.

15. The shape measuring apparatus according to claim 2, wherein the measuring probe comprises an light sectioning probe having a slit light illumination unit for irradiating the candidate object with a slit light in the form of a sheet, and a camera for imaging the candidate object illuminated by the slit light, the camera being arranged with an optical axis offset by a predetermined angle relative to the direction of irradiation of the slit light.

16. The shape measuring apparatus according to claim 3, wherein the measuring probe comprises an light sectioning probe having a slit light illumination unit for irradiating the candidate object with a slit light in the form of a sheet, and a camera for imaging the candidate object illuminated by the slit light, the camera being arranged with an optical axis offset by a predetermined angle relative to the direction of irradiation of the slit light.

7. A shape measuring apparatus comprising:

a support device on which a candidate object is mounted,

an imaging device for illuminating the candidate object mounted on the support device, receiving light from the candidate object, and imaging the candidate object,

a measurement processor for measuring the candidate object based on an image of the candidate object taken by the imaging device,

a movement mechanism for supporting the support device and the imaging device to enable at least three relative movements among relative rotational movement around three mutually perpendicular axes and relative translational movement along the three axes, and

an operation control device for controlling the relative movement of the support device and the imaging device,

the operation control device having a first operational control mode for controlling the relative movement of the imaging device and the support device in order for the imaging device to scan an imaged portion of the candidate object, and a second operational control mode for controlling the relative movement of the imaging device and the support device while maintaining a state in which the imaging device can image the imaged portion.

8. The shape measuring apparatus according to claim 7, further comprising an operating device for operating the movement mechanism via the operation control device, wherein the operation control device is configured so as to control, based on an operating signal from the operating device, the relative movement governed by the first or second operational control mode.

9. The shape measuring apparatus according to claim 7, wherein the operation control device is configured so as to control, in the second operational control mode, the relative movement while a work distance is kept constant, the work distance being a distance between the imaging device and a position for viewing the candidate object.

10. The shape measuring apparatus according to claim 7, wherein the movement mechanism comprises a translational movement mechanism for supporting the imaging device to allow translational movement along the three axes, and a rotational movement mechanism for supporting the support device to allow rotational movement around at least two of the three axes.

11. The shape measuring apparatus according to claim 7, wherein the movement mechanism comprises a translational movement mechanism for supporting the imaging device to enable translational movement along the three axes, and a rotational movement mechanism for supporting the imaging device to enable rotational movement around a predetermined axis among the three axes, and to enable rotational movement around a rotational axis extending within a plane perpendicular to the predetermined axis and which is rotationally displaced within the plane accompanying rotation around the predetermined axis.

17. The shape measuring apparatus according to claim 8, wherein the operation control device is configured so as to control, in the second operational control mode, the relative movement while a work distance is kept constant, the work distance being a distance between the imaging device and a position for viewing the candidate object.

18. The shape measuring apparatus according to claim 8, wherein the movement mechanism comprises a translational movement mechanism for supporting the imaging device to allow translational movement along the three axes, and a rotational movement mechanism for supporting the support device to allow rotational movement around at least two of the three axes.

19. The shape measuring apparatus according to claim 9, wherein the movement mechanism comprises a translational movement mechanism for supporting the imaging device to allow translational movement along the three axes, and a rotational movement mechanism for supporting the support device to allow rotational movement around at least two of the three axes.

20. The shape measuring apparatus according to claim 8, wherein the movement mechanism comprises a translational movement mechanism for supporting the imaging device to enable translational movement along the three axes, and a rotational movement mechanism for supporting the imaging device to enable rotational movement around a predetermined axis among the three axes, and to enable rotational movement around a rotational axis extending within a plane perpendicular to the predetermined axis and which is rotationally displaced within the plane accompanying rotation around the predetermined axis.