NANO PARTICLE TRACKING DEVICE, CHANNEL STRUCTURE OF THE NANO PARTICLE TRACKING DEVICE, AND METHOD OF FABRICATING THE CHANNEL STRUCTURE OF THE NANO PARTICLE TRACKING DEVICE
First Claim
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1. A channel structure of a nano particle tracking device, comprising:
- a pair of microchannels in which a specimen including nano particles is accommodated, and which face each other;
at least one nano channel which is between the pair of microchannels, which connects the pair of microchannels to each other, and through which the nano particles in the specimen are moved between the pair of microchannels; and
a nano grating below the nano channel and crossing the nano channel perpendicularly.
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Abstract
A nano particle tracking device includes a channel structure. The channel structure of the nano particle tracking device includes a pair of microchannels in which a specimen including nano particles is accommodated and which face each other, at least one nano channel which is between the pair of microchannels, which connects the pair of microchannels to each other and through which the nano particles in the specimen are moved, and a nano grating below the nano channel and crossing the nano channel perpendicularly.
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Citations
27 Claims
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1. A channel structure of a nano particle tracking device, comprising:
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a pair of microchannels in which a specimen including nano particles is accommodated, and which face each other; at least one nano channel which is between the pair of microchannels, which connects the pair of microchannels to each other, and through which the nano particles in the specimen are moved between the pair of microchannels; and a nano grating below the nano channel and crossing the nano channel perpendicularly. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of fabricating a channel structure, the method comprising:
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forming a nano grating having a pattern of a plurality of parallel opaque bars arranged at regular intervals, on a top surface of a first transparent substrate; forming a channel forming layer on the first transparent substrate and covering the nano grating; forming a junction layer on the channel forming layer; forming nano channels in a direction perpendicular the nano grating by patterning portions of the junction layer corresponding to the nano grating; forming a pair of microchannels which is connected to end portions of each of the nano channels by partially etching the junction layer, the channel forming layer, and the first transparent substrate; and bonding a second transparent substrate directly onto the junction layer. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
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26. A method of fabricating a channel structure, the method comprising:
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forming a nano grating having a pattern of a plurality of parallel opaque bars arranged at regular intervals on a top surface of a first transparent substrate; forming a channel forming layer on the first transparent substrate and covering the nano grating; forming nano channel in a direction perpendicular to the nano grating by patterning portion of a top surface of the channel forming layer corresponding to the nano grating, such that a thickness of the channel forming layer corresponding to the nano channel is smaller than remaining portions of the channel forming layer; forming a pair of microchannels which is connected to end portions the nano channel by partially etching the channel forming layer and the first transparent substrate; and bonding a second transparent substrate directly onto the channel forming layer. - View Dependent Claims (27)
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Specification