Systems and Methods for Susceptor Assisted Microwave Annealing
First Claim
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1. A system configured to anneal comprising:
- a microwave emitter configured to emit a microwave at a single frequency during an anneal time;
an anneal unit to be annealed, the anneal unit having a top side, a bottom side, and one or more edge sides; and
a susceptor configured to absorb microwave energy, where the susceptor is adjacent to the one or more edge sides and at the bottom side of the anneal unit.
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Abstract
Systems and methods for microwave annealing are disclosed. In some embodiments, the system may comprise a microwave emitter configured to emit a microwave at a single frequency during an anneal time. In some embodiments, the system may further comprise an anneal unit to be annealed, the anneal unit having a top side, a bottom side, and one or more edge sides. In some embodiments, the system may further comprise a susceptor configured to absorb microwave energy, where the susceptor is adjacent to the edge side and at the bottom side of the anneal unit.
30 Citations
26 Claims
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1. A system configured to anneal comprising:
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a microwave emitter configured to emit a microwave at a single frequency during an anneal time; an anneal unit to be annealed, the anneal unit having a top side, a bottom side, and one or more edge sides; and a susceptor configured to absorb microwave energy, where the susceptor is adjacent to the one or more edge sides and at the bottom side of the anneal unit. - View Dependent Claims (2, 3, 4, 6, 7, 8, 9, 10, 11, 12, 13)
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5. The system of claim 5, the dopant selected from the group consisting of arsenic (As), boron (B), silicon (Si), and aluminum (Al).
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14. A method for annealing comprising:
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receiving an anneal unit having a top side, a bottom side, and one or more edge sides; arranging a susceptor configured to absorb microwave energy such that the susceptor is adjacent to the one or more edge sides and the bottom side of the anneal unit; starting a single-frequency microwave emitter configured to heat both the susceptor and the anneal unit during an anneal time; and stopping the single-frequency microwave emitter after the top side of the anneal unit has reached a specified temperature. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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Specification