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Systems and Methods for Susceptor Assisted Microwave Annealing

  • US 20120196453A1
  • Filed: 02/01/2012
  • Published: 08/02/2012
  • Est. Priority Date: 02/01/2011
  • Status: Abandoned Application
First Claim
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1. A system configured to anneal comprising:

  • a microwave emitter configured to emit a microwave at a single frequency during an anneal time;

    an anneal unit to be annealed, the anneal unit having a top side, a bottom side, and one or more edge sides; and

    a susceptor configured to absorb microwave energy, where the susceptor is adjacent to the one or more edge sides and at the bottom side of the anneal unit.

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