METHOD AND APPARATUS FOR IMPROVING SHOCK RESISTANCE OF MEMS STRUCTURES
First Claim
1. An apparatus, comprising:
- a base;
a movable element, wherein the movable element is movably connected to the base such that the movable element can transition between at least two movable element positions; and
at least one hold element, wherein each of the at least one hold element is moveably connected to the base via a corresponding one or more hold element actuators, wherein the one or more hold element actuators of each hold element are configured such that the one or more hold element actuators can be driven to transition the corresponding hold element between at least two hold element positions, wherein the at least two hold element positions comprises a hold element hold position, wherein when one or more of the at least one hold element is in the hold element hold position movement of the movable element is limited.
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Accused Products
Abstract
Embodiments of the subject invention relate to a method and apparatus for stabilizing a moveable element of a device. In an embodiment, a device is provided including a base, an element capable of moving relative to the base, and at least one actuator. Each actuator of the at least one actuator is configured such that when the actuator is driven the actuator moves into a hold position, wherein the actuator limits movement of the element. In a particular embodiment, the at least one actuator holds the element, or a portion of the element, at a particular position, angle, and/or attitude. In an embodiment, the at least one actuator is used to limit movement of the element when the device is turned off. The at least one actuator can be positioned to allow greater movement of the element when the device is turned on.
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Citations
37 Claims
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1. An apparatus, comprising:
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a base; a movable element, wherein the movable element is movably connected to the base such that the movable element can transition between at least two movable element positions; and at least one hold element, wherein each of the at least one hold element is moveably connected to the base via a corresponding one or more hold element actuators, wherein the one or more hold element actuators of each hold element are configured such that the one or more hold element actuators can be driven to transition the corresponding hold element between at least two hold element positions, wherein the at least two hold element positions comprises a hold element hold position, wherein when one or more of the at least one hold element is in the hold element hold position movement of the movable element is limited. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A method for stabilizing an apparatus, comprising:
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providing an apparatus, comprising; a base; a movable element, wherein the movable element is movably connected to the base such that the movable element can transition between at least two movable element positions; and at least one hold element, wherein each of the at least one hold element is moveably connected to the base via a corresponding one or more hold element actuators, wherein the one or more hold element actuators of each hold element are configured such that the one or more hold element actuators can be driven to transition the corresponding hold element between at least two hold element positions, wherein the at least two hold element positions comprises a hold element hold position, wherein when one or more of the at least one hold element is in the hold element hold position movement of the movable element is limited; receiving an off signal; driving at least one of the one or more hold element actuators to transition the hold element to the hold element hold position. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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Specification