FABRICATION PROCESS FOR MASTERING IMAGING LENS ARRAYS
First Claim
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1. A method of mastering a waferscale imaging lens array comprising:
- fabricating a plurality of master lens pins, each master lens pin being of a different lens profile;
checking each of said master lens pins for shape deviations and repeating the fabricating step until a set of final master lens pins are formed, said final set of master lens pins being substantially free of shape deviations; and
duplicating each of said master lens pins on a substrate as a lens element a number of times sufficient to form the master waferscale lens array.
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Abstract
A process and method for fabricating a master lens array for use in the manufacture of duplicate lens arrays is provided. The fabrication methods provided herein are capable of maximizing the quality of the master lens array in an efficient and cost effective manner, thereby reducing the propagation of errors in the lenses formed using the master lens array.
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Citations
5 Claims
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1. A method of mastering a waferscale imaging lens array comprising:
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fabricating a plurality of master lens pins, each master lens pin being of a different lens profile; checking each of said master lens pins for shape deviations and repeating the fabricating step until a set of final master lens pins are formed, said final set of master lens pins being substantially free of shape deviations; and duplicating each of said master lens pins on a substrate as a lens element a number of times sufficient to form the master waferscale lens array. - View Dependent Claims (2, 3, 4, 5)
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Specification