PARTICLE BEAM IRRADIATION SYSTEM AND PARTICLE BEAM IRRADIATION METHOD
First Claim
1. A particle irradiation system, in which scanning is performed by repeating the operation of moving an incident particle beam in at least one direction and making the incident particle beam dwell so as to irradiate the particle beam onto a target, comprising a first deflector having the maximum deflection amount which enables to move the particle beam in one direction to the maximum width of a target;
- a second deflector having the maximum deflection amount which enables to move the particle beam in the one direction and whose maximum deflection amount is less than the maximum deflection amount of the first deflector; and
a scanning control apparatus which controls the first deflector and the second deflector,wherein the scanning control apparatus performs a control in which the particle beam is moved by increasing at least a deflection amount of the second deflector when the particle beam is moved, and performs a deflection substitution control in which a deflection of the second deflector is substituted to a deflection of the first deflector by decreasing the deflection amount of the second deflector and changing a deflection amount of the first deflector so as to make a position of the particle beam in the target dwell when the particle beam dwells.
1 Assignment
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Accused Products
Abstract
A particle beam irradiation system comprising a first deflector having the maximum deflection amount which enables to move a particle beam in one direction to the maximum width of a target and a second deflector having the maximum deflection amount is less than the maximum deflection amount of the first deflector performs a control in which the particle beam is moved by increasing at least a deflection amount of the second deflector when the particle beam is moved, and performs a deflection substitution control in which a deflection of the second deflector is substituted to a deflection of the first deflector by decreasing the deflection amount of the second deflector and changing a deflection amount of the first deflector so as to make a position of the particle beam in the target dwell when the particle beam dwells.
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Citations
12 Claims
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1. A particle irradiation system, in which scanning is performed by repeating the operation of moving an incident particle beam in at least one direction and making the incident particle beam dwell so as to irradiate the particle beam onto a target, comprising a first deflector having the maximum deflection amount which enables to move the particle beam in one direction to the maximum width of a target;
- a second deflector having the maximum deflection amount which enables to move the particle beam in the one direction and whose maximum deflection amount is less than the maximum deflection amount of the first deflector; and
a scanning control apparatus which controls the first deflector and the second deflector,wherein the scanning control apparatus performs a control in which the particle beam is moved by increasing at least a deflection amount of the second deflector when the particle beam is moved, and performs a deflection substitution control in which a deflection of the second deflector is substituted to a deflection of the first deflector by decreasing the deflection amount of the second deflector and changing a deflection amount of the first deflector so as to make a position of the particle beam in the target dwell when the particle beam dwells. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
- a second deflector having the maximum deflection amount which enables to move the particle beam in the one direction and whose maximum deflection amount is less than the maximum deflection amount of the first deflector; and
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11. A particle beam irradiation method in which a target is irradiated by repeating the operation of moving the particle beam in at least one direction and making the particle beam dwell so as to scan by a first deflector having the maximum deflection amount which enables to move an incident particle beam in the one direction to the maximum width of the target and a second deflector having the maximum deflection amount, which enables to move the particle beam in the one direction, is less than the maximum deflection amount of the first deflector
wherein at least a deflection amount of the second deflector is increased so as to move the particle beam in the target when the particle beam moves, and the deflection amount of the second deflector is decreased and a deflection amount of the first deflector is changed in such a manner that a deflection of the second deflector is gradually substituted to a deflection of the first deflector so as to make a position of the particle beam in the target dwell when the particle beam dwells.
Specification