TRENCH MOS BARRIER SCHOTTKY (TMBS) HAVING MULTIPLE FLOATING GATES
First Claim
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1. A semiconductor rectifier, comprising:
- a semiconductor substrate having a first type of conductivity;
an epitaxial layer formed on the substrate having the first type of conductivity and being more lightly doped than the substrate;
a plurality of floating gates formed in the epitaxial layer;
a metal layer disposed over the epitaxial layer to form a Schottky contact therebetween; and
a first electrode formed over the metal layer and a second electrode formed on a backside of the substrate.
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Abstract
A semiconductor rectifier is provided which includes a semiconductor substrate having a first type of conductivity. An epitaxial layer is formed on the substrate. The epitaxial layer has the first type of conductivity and is more lightly doped than the substrate. A plurality of floating gates is formed in the epitaxial layer and a metal layer is disposed over the epitaxial layer to form a Schottky contact therebetween. A first electrode is formed over the metal layer and a second electrode is formed on a backside of the substrate.
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Citations
14 Claims
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1. A semiconductor rectifier, comprising:
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a semiconductor substrate having a first type of conductivity; an epitaxial layer formed on the substrate having the first type of conductivity and being more lightly doped than the substrate; a plurality of floating gates formed in the epitaxial layer; a metal layer disposed over the epitaxial layer to form a Schottky contact therebetween; and a first electrode formed over the metal layer and a second electrode formed on a backside of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of fabricating a rectifier comprising:
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providing a semiconductor body of a first conductivity type; etching a plurality of trenches in a surface of the semiconductor body so that a mesa remains between adjacent trenches, each of the trenches having a sidewall and a bottom; forming a plurality of floating gates in each of the trenches; and forming a metal layer on a surface of the mesa so that a Schottky contact is formed therewith. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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Specification