THROUGH SILICON VIAS USING CARBON NANOTUBES
First Claim
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1. A method of making through silicon vias with carbon nanotube interconnects, the method comprising:
- placing a silicon wafer mold comprising a plurality of holes onto a carbon nanotube growth source;
forming carbon nanotubes within at least a portion of the plurality of holes; and
separating the carbon nanotube growth source from the silicon wafer mold so that the carbon nanotubes formed within at least a portion of the plurality of holes remain substantially within the plurality of holes, thereby forming through silicon vias.
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Abstract
The various embodiments of the present invention provide carbon nanotube (CNT)-based TSVs and methods of making the same. The CNT-based TSVs embodiments comprise a silicon wafer having a plurality of through-vias defined therein, and a support layer comprising a CNT catalyst layer disposed beneath the silicon wafer to facilitate CNT growth through the plurality of through-vias. Once CNT arrays have grown inside and through the through-vias, the support layer and accompanying CNT catalyst layer can be removed from the silicon wafer, which will result in the CNTs remaining in the TSVs.
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Citations
21 Claims
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1. A method of making through silicon vias with carbon nanotube interconnects, the method comprising:
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placing a silicon wafer mold comprising a plurality of holes onto a carbon nanotube growth source; forming carbon nanotubes within at least a portion of the plurality of holes; and separating the carbon nanotube growth source from the silicon wafer mold so that the carbon nanotubes formed within at least a portion of the plurality of holes remain substantially within the plurality of holes, thereby forming through silicon vias. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of making through silicon vias utilizing carbon nanotubes, comprising:
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coating a bottom surface of a silicon wafer with a carbon nanotube catalyst layer followed by support layer; etching a plurality of holes through the silicon wafer such that the plurality of holes extend from a top surface of the silicon wafer to the bottom side of the silicon wafer but do not penetrate the carbon nanotube catalyst layer or support layer; and growing carbon nanotubes through at least a portion of the plurality of holes. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification