MEMS OSCILLATING MAGNETIC SENSOR AND METHOD OF MAKING

• US 20120206134A1
• Filed: 08/11/2010
• Published: 08/16/2012
• Est. Priority Date: 08/11/2010
• Status: Active Grant

• Current Assignee: United States Of America As Represented By The Secretary Of The Army (Government of the United States of America)
• Original Assignee: United States Secretary of the Army
• Inventors: FISCHER, GREGORY A., FINE, JONATHAN E., EDELSTEIN, ALAN
• Granted Patent: US 8,278,919 B2
• Time in Patent Office: Days
• US Class Current: 324/244
• CPC Class Codes: G01R 33/072 Constructional adaptation of the sensor to specific applications
• CPC Class Codes: G01R 33/091 Constructional adaptation of the sensor to specific applications

Abstract

A microelectromechanical system (MEMS) device for sensing a magnetic field comprising: a base; a cantilever attached to the base structure at a first end and movable at a second end, the second end oscillating at a predetermined frequency upon application of a current; a magnetic sensor attached to the movable second end; at least one flux concentrator mounted on the base adapted to transfer magnetic flux to the sensor; whereby when the current is applied, the oscillation of the cantilever causes the sensor to oscillate between the lines of flux transferred from the at least one flux concentrator resulting in the shift of the frequency of the sensed magnetic field to the predetermined frequency. The invention further comprises a method of making the MEMS device.

Claims