ELECTROSTATIC CAPACITIVE SENSOR
First Claim
1. An electrostatic capacitive sensor able to detect a first electrostatic capacitance and a second electrostatic capacitance, comprising:
- a first member wherein is formed a movable electrode plate that has electrical conductivity;
a first electrode forming a first electrostatic capacitance with the electrode plate;
a second electrode forming a second electrostatic capacitance with the electrode plate;
a second member forming a first space between itself and one face of the electrode plate; and
a third member forming a second space between itself and the other face of the electrode plate;
wherein;
a first gas is filled into the first space and a second gas, which has a coefficient of thermal expansion different from that of the first gas, is filled into the second space.
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Accused Products
Abstract
An electrostatic capacitive sensor able to detect a first electrostatic capacitance and a second electrostatic capacitance, comprising: a member wherein is formed a movable diaphragm that has electrical conductivity; a thin-film electrode that forms a first electrostatic capacitance with the diaphragm; a thin-film electrode that forms a second electrostatic capacitance with the diaphragm; an upper member that is provided so as to form a space between itself and the top face of the diaphragm; and a tower member that is provided so as to form a second space between itself and the bottom face of the diaphragm; wherein: a gas is filled into the space and another gas, which has a coefficient of thermal expansion different from that of the gas, is filled into the second space.
18 Citations
9 Claims
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1. An electrostatic capacitive sensor able to detect a first electrostatic capacitance and a second electrostatic capacitance, comprising:
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a first member wherein is formed a movable electrode plate that has electrical conductivity; a first electrode forming a first electrostatic capacitance with the electrode plate; a second electrode forming a second electrostatic capacitance with the electrode plate; a second member forming a first space between itself and one face of the electrode plate; and a third member forming a second space between itself and the other face of the electrode plate;
wherein;a first gas is filled into the first space and a second gas, which has a coefficient of thermal expansion different from that of the first gas, is filled into the second space. - View Dependent Claims (6, 7, 8, 9)
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2. An electrostatic capacitive sensor able to detect a first electrostatic capacitance and a second electrostatic capacitance, comprising:
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a first member wherein is formed a movable electrode plate that has electrical conductivity; a first electrode forming a first electrostatic capacitance with the electrode plate; a second electrode forming a second electrostatic capacitance; a second member forming a first space between itself and one face of the electrode plate; and a third member forming a second space between itself and the other face of the electrode plate;
wherein;a first gas is filled into the first space and a second gas, which has a coefficient of thermal expansion different from that of the first gas, is filled into the second space. - View Dependent Claims (3, 4, 5)
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Specification