DOUBLE-AXLE, SHOCK-RESISTANT ROTATION RATE SENSOR WITH LINEAR AND ROTARY SEISMIC ELEMENTS
1 Assignment
0 Petitions
Accused Products
Abstract
A micromechanical rotation rate sensor has at least one first and one second seismic mass coupled to at least one first drive device and are suspended such that the first and second seismic masses are driven such that they are deflected in antiphase in one drive mode, with the rotation rate sensor being designed such that it can detect rotation rates about at least two mutually essentially orthogonal sensitive axes, wherein at least the first and second seismic masses are designed and suspended such that they oscillate in antiphase in a first read mode when a first rotation rate about the first sensitive axis is detected, and the first and second seismic masses and/or additional seismic masses are designed and suspended such that they oscillate in antiphase in a second read mode when a second rotation rate about the second sensitive axis is detected.
-
Citations
30 Claims
-
1-14. -14. (canceled)
-
15. A micromechanical rotation rate sensor, comprising a substrate whose base surface is aligned parallel to the x-y plane of a Cartesian coordinate system (x, y, z), with the rotation rate sensor having at least one first and one second seismic mass which are coupled to at least one first drive device and are suspended such that the first and the second seismic masses are driven such that they are deflected in antiphase in one drive mode, with the rotation rate sensor being designed such that it can detect rotation rates about at least two mutually essentially orthogonal sensitive axes (z, y), wherein
at least the first and the second seismic masses are designed and suspended such that they oscillate in antiphase in a first read mode when a first rotation rate about the first sensitive axis (y) is detected, and the first and second seismic masses and/or additional seismic masses are designed and suspended such that they oscillate in antiphase in a second read mode when a second rotation rate about the second sensitive axis (z) is detected, with the seismic masses being associated with read devices which are designed and arranged with respect to the seismic masses such that they detect the deflections of the seismic masses with respect to the first and with respect to the second read mode in each case in phase and in antiphase.
Specification