SCANNING ELECTRON MICROSCOPE

• US 20120211654A1
• Filed: 11/12/2010
• Published: 08/23/2012
• Est. Priority Date: 11/26/2009
• Status: Active Grant

• Current Assignee: Hitachi High-Tech Company Limited (Hitachi, Ltd.)
• Original Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Inventors: Iwaya, Toru, Kobori, Sakae, Ohtaki, Tomohisa, Hatano, Haruhiko
• Granted Patent: US 8,921,784 B2
• Time in Patent Office: Days
• US Class Current: 250/310
• CPC Class Codes: H01J 37/04 Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement H01J37/32009, H01J37/32623, H01J37/3266, H01J37/32697 take precedence; electron or ion-optical systems for localised treatment of objects H01J37/3007
• CPC Class Codes: H01J 37/141 Electromagnetic lenses
• CPC Class Codes: H01J 37/143 Permanent magnetic lenses
• CPC Class Codes: H01J 37/26 Electron or ion microscopes; Electron or ion diffraction tubes
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

There is provided a scanning electron microscope capable of achieving a size reduction of the device while at the same time suppressing the increase in column temperature as well as maintaining performance, e.g., resolution, etc. With respect to a scanning electron microscope for observing a sample by irradiating the sample with an electron beam emitted from an electron source and focused by condenser lenses, and detecting secondary electrons from the sample, the condenser lenses comprise both an electromagnetic coil-type condenser lens and a permanent magnet-type condenser lens.

Claims

1. A scanning electron microscope for observing a sample by irradiating the sample with an electron beam emitted from an electron source and focused by condenser lenses, and detecting secondary electrons, backscattered electrons, and other signals from the sample, wherein

the condenser lenses comprise both an electromagnetic coil-type condenser lens and a permanent magnet-type condenser lens.

2. The scanning electron microscope according to claim 1, wherein the topmost condenser lens is of a permanent magnet-type.

3. The scanning electron microscope according to claim 1, further comprising a deflector that corrects the optical axis of the electron beam, the deflector being provided in at least one of the following manners:

below, coaxially with, and above the permanent magnet-type condenser lens.

4. The scanning electron microscope according to claim 2, further comprising a deflector that corrects the optical axis of the electron beam, the deflector being provided in at least one of the following manners:

below, coaxially with, and above the permanent magnet-type condenser lens.