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SCANNING ELECTRON MICROSCOPE

  • US 20120211654A1
  • Filed: 11/12/2010
  • Published: 08/23/2012
  • Est. Priority Date: 11/26/2009
  • Status: Active Grant
First Claim
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1. A scanning electron microscope for observing a sample by irradiating the sample with an electron beam emitted from an electron source and focused by condenser lenses, and detecting secondary electrons, backscattered electrons, and other signals from the sample, whereinthe condenser lenses comprise both an electromagnetic coil-type condenser lens and a permanent magnet-type condenser lens.

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