SUBSTRATE WITH ANTIREFLECTION COATING AND METHOD FOR PRODUCING SAME
First Claim
1. A coated substrate comprising:
- a substrate; and
a multilayer antireflection coating on at least one side of the substrate, the multilayer antireflection coating comprising layers having a higher refractive index alternated with layers having a lower refractive index, wherein the layers having a lower refractive index are formed of silicon oxide with a proportion of aluminum and have a first ratio of an amount of aluminum to an amount of silicon that is greater than 0.05, but with the amount of silicon being predominant relative to the amount of aluminum, and wherein the layers having a higher refractive index include a material selected from the group consisting of a silicide, an oxide, and a nitride.
1 Assignment
0 Petitions
Accused Products
Abstract
A substrate is provided with an abrasion resistance antireflection coating. The coated substrate includes a multilayer antireflection coating on at least one side. The coating has layers with different refractive indices, wherein higher refractive index layers alternate with lower refractive index layers. The layers having a lower refractive index are formed of silicon oxide with a proportion of aluminum, with a ratio of the amounts of aluminum to silicon is greater than 0.05, preferably greater than 0.08, but with the amount of silicon predominant relative to the amount of aluminum. The layers having a higher refractive index include a silicide, an oxide, or a nitride.
-
Citations
18 Claims
-
1. A coated substrate comprising:
-
a substrate; and a multilayer antireflection coating on at least one side of the substrate, the multilayer antireflection coating comprising layers having a higher refractive index alternated with layers having a lower refractive index, wherein the layers having a lower refractive index are formed of silicon oxide with a proportion of aluminum and have a first ratio of an amount of aluminum to an amount of silicon that is greater than 0.05, but with the amount of silicon being predominant relative to the amount of aluminum, and wherein the layers having a higher refractive index include a material selected from the group consisting of a silicide, an oxide, and a nitride. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
-
-
14. A method for producing a coated substrate, comprising:
-
depositing a multilayer antireflection coating to at least one side of a substrate, the coating comprising successively deposited layers having different refractive indices, with layers having a higher refractive index alternating with layers having a lower refractive index, wherein the layers having the lower refractive index are formed of silicon oxide with a proportion of aluminum and a ratio of aluminum to silicon that is greater than 0.05, but with an amount of silicon predominant relative to an amount of aluminum, and wherein the layers having the higher refractive index comprise a material selected from the group consisting of silicide, oxide, and nitride. - View Dependent Claims (15, 16, 17, 18)
-
Specification